Sensors 2012, 12(10), 13075-13087; doi:10.3390/s121013075

Electromagnetically-Actuated Reciprocating Pump for High-Flow-Rate Microfluidic Applications

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Received: 31 July 2012; in revised form: 28 August 2012 / Accepted: 22 September 2012 / Published: 26 September 2012
(This article belongs to the Special Issue Microfluidic Devices)
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Abstract: This study presents an electromagnetically-actuated reciprocating pump for high-flow-rate microfluidic applications. The pump comprises four major components, namely a lower glass plate containing a copper microcoil, a middle PMMA plate incorporating a PDMS diaphragm with a surface-mounted magnet, upper PMMA channel plates, and a ball-type check valve located at the channel inlet. When an AC current is passed through the microcoil, an alternating electromagnetic force is established between the coil and the magnet. The resulting bi-directional deflection of the PDMS diaphragm causes the check-valve to open and close; thereby creating a pumping effect. The experimental results show that a coil input current of 0.4 A generates an electromagnetic force of 47 mN and a diaphragm deflection of 108 μm. Given an actuating voltage of 3 V and a driving frequency of 15 Hz, the flow rate is found to be 13.2 mL/min under zero head pressure conditions.
Keywords: electromagnetic pump; electroplating; MEMS; PDMS diaphragm
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MDPI and ACS Style

Ke, M.-T.; Zhong, J.-H.; Lee, C.-Y. Electromagnetically-Actuated Reciprocating Pump for High-Flow-Rate Microfluidic Applications. Sensors 2012, 12, 13075-13087.

AMA Style

Ke M-T, Zhong J-H, Lee C-Y. Electromagnetically-Actuated Reciprocating Pump for High-Flow-Rate Microfluidic Applications. Sensors. 2012; 12(10):13075-13087.

Chicago/Turabian Style

Ke, Ming-Tsun; Zhong, Jian-Hao; Lee, Chia-Yen. 2012. "Electromagnetically-Actuated Reciprocating Pump for High-Flow-Rate Microfluidic Applications." Sensors 12, no. 10: 13075-13087.

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