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Sensors 2012, 12(1), 226-232; doi:10.3390/s120100226
Article

Self-Calibrated Humidity Sensor in CMOS without Post-Processing

1,* , 1
 and
2
1 Maenaka Human-sensing Fusion Project, 8111, Shosha 2167, Himeji-shi, Hyogo-ken, Japan 2 Hyogo Prefectural University, 8111, Shosha 2167, Himeji-shi, Hyogo-ken, Japan
* Author to whom correspondence should be addressed.
Received: 30 November 2011 / Revised: 22 December 2011 / Accepted: 27 December 2011 / Published: 27 December 2011
(This article belongs to the Section Physical Sensors)
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Abstract

A 1.1 µW power dissipation, voltage-output humidity sensor with 10% relative humidity accuracy was developed in the LFoundry 0.15 µm CMOS technology without post-processing. The sensor consists of a woven lateral array of electrodes implemented in CMOS top metal, a humidity-sensitive layer of Intervia Photodielectric 8023D-10, a CMOS capacitance to voltage converter, and the self-calibration circuitry.
Keywords: capacitive sensors; microsensors; humidity measurement; CMOS integrated circuits capacitive sensors; microsensors; humidity measurement; CMOS integrated circuits
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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Nizhnik, O.; Higuchi, K.; Maenaka, K. Self-Calibrated Humidity Sensor in CMOS without Post-Processing. Sensors 2012, 12, 226-232.

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