Sensors 2010, 10(5), 4983-4995; doi:10.3390/s100504983
Article

Detecting Nano-Scale Vibrations in Rotating Devices by Using Advanced Computational Methods

Raúl M. Del Toro 1,* email, Rodolfo E. Haber 1,2 email and Michael C. Schmittdiel 1 email
1 Centro de Automática y Robótica, Consejo Superior de Investigaciones Científicas, Ctra. Campo Real km 0.200, Arganda del Rey 28500, Madrid, Spain 2 Escuela Politécnica Superior, Universidad Autónoma de Madrid, C/ Francisco Tomás y Valiente 11 28049, Madrid, Spain
* Author to whom correspondence should be addressed.
Received: 3 March 2010; in revised form: 27 April 2010 / Accepted: 6 May 2010 / Published: 18 May 2010
(This article belongs to the Special Issue Instrumentation, Signal Treatment and Uncertainty Estimation in Sensors)
PDF Full-text Download PDF Full-Text [730 KB, Updated Version, uploaded 18 May 2010 16:41 CEST]
The original version is still available [730 KB, uploaded 18 May 2010 13:32 CEST]
Abstract: This paper presents a computational method for detecting vibrations related to eccentricity in ultra precision rotation devices used for nano-scale manufacturing. The vibration is indirectly measured via a frequency domain analysis of the signal from a piezoelectric sensor attached to the stationary component of the rotating device. The algorithm searches for particular harmonic sequences associated with the eccentricity of the device rotation axis. The detected sequence is quantified and serves as input to a regression model that estimates the eccentricity. A case study presents the application of the computational algorithm during precision manufacturing processes.
Keywords: vibration measurement; signal processing algorithm; frequency domain analysis; nanotechnology

Article Statistics

Click here to load and display the download statistics.

Cite This Article

MDPI and ACS Style

Del Toro, R.M.; Haber, R.E.; Schmittdiel, M.C. Detecting Nano-Scale Vibrations in Rotating Devices by Using Advanced Computational Methods. Sensors 2010, 10, 4983-4995.

AMA Style

Del Toro RM, Haber RE, Schmittdiel MC. Detecting Nano-Scale Vibrations in Rotating Devices by Using Advanced Computational Methods. Sensors. 2010; 10(5):4983-4995.

Chicago/Turabian Style

Del Toro, Raúl M.; Haber, Rodolfo E.; Schmittdiel, Michael C. 2010. "Detecting Nano-Scale Vibrations in Rotating Devices by Using Advanced Computational Methods." Sensors 10, no. 5: 4983-4995.

Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert