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Sensors 2010, 10(5), 4983-4995; doi:10.3390/s100504983

Detecting Nano-Scale Vibrations in Rotating Devices by Using Advanced Computational Methods

1
Centro de Automática y Robótica, Consejo Superior de Investigaciones Científicas, Ctra. Campo Real km 0.200, Arganda del Rey 28500, Madrid, Spain
2
Escuela Politécnica Superior, Universidad Autónoma de Madrid, C/ Francisco Tomás y Valiente 11 28049, Madrid, Spain
*
Author to whom correspondence should be addressed.
Received: 3 March 2010 / Revised: 27 April 2010 / Accepted: 6 May 2010 / Published: 18 May 2010
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Abstract

This paper presents a computational method for detecting vibrations related to eccentricity in ultra precision rotation devices used for nano-scale manufacturing. The vibration is indirectly measured via a frequency domain analysis of the signal from a piezoelectric sensor attached to the stationary component of the rotating device. The algorithm searches for particular harmonic sequences associated with the eccentricity of the device rotation axis. The detected sequence is quantified and serves as input to a regression model that estimates the eccentricity. A case study presents the application of the computational algorithm during precision manufacturing processes.
Keywords: vibration measurement; signal processing algorithm; frequency domain analysis; nanotechnology vibration measurement; signal processing algorithm; frequency domain analysis; nanotechnology
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This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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MDPI and ACS Style

Del Toro, R.M.; Haber, R.E.; Schmittdiel, M.C. Detecting Nano-Scale Vibrations in Rotating Devices by Using Advanced Computational Methods. Sensors 2010, 10, 4983-4995.

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