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Sensors 2010, 10(4), 4071-4082; doi:10.3390/s100404071

Towards Fully Integrated Wireless Impedimetric Sensors

 and *
Instituto de Microelectrónica de Barcelona, IMB-CNM (CSIC), Campus UAB, E-08193 Cerdanyola, Spain
* Author to whom correspondence should be addressed.
Received: 21 February 2010 / Revised: 10 March 2010 / Accepted: 13 April 2010 / Published: 21 April 2010
(This article belongs to the Section Physical Sensors)
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We report on the design and characterization of the building blocks of a single-chip wireless chemical sensor fabricated with a commercial complementary metal-oxide-silicon (CMOS) technology, which includes two types of transducers for impedimetric measurements (4-electrode array and two interdigitated electrodes), instrumentation circuits, and a metal coil and circuits for inductive power and data transfer. The electrodes have been formed with a polycrystalline silicon layer of the technology by a simple post-process that does not require additional deposition or lithography steps, but just etching steps. A linear response to both conductivity and permittivity of solutions has been obtained. Wireless communication of the sensor chip with a readout unit has been demonstrated. The design of the chip was prepared for individual block characterization and not for full system characterization. The integration of chemical transducers within monolithic wireless platforms will lead to smaller, cheaper, and more reliable chemical microsensors, and will open up the door to numerous new applications where liquid mediums that are enclosed in sealed receptacles have to be measured.
Keywords: wireless sensors; telemetry; impedimetric sensors; CMOS sensors wireless sensors; telemetry; impedimetric sensors; CMOS sensors
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Segura-Quijano, F.; Sacristán-Riquelme, J.; García-Cantón, J.; Osés, M.T.; Baldi, A. Towards Fully Integrated Wireless Impedimetric Sensors. Sensors 2010, 10, 4071-4082.

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