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Journal: Sensors, 2010
Volume: 10
Page(s): 1338-1354
1338-1354
Article: Characterization of Thick and Thin Film SiCN for Pressure Sensing at High Temperatures
Leo, A.; Andronenko, S.; Stiharu, I.; Bhat, R.B.

http://www.mdpi.com/1424-8220/10/2/1338

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