Sensors 2010, 10(12), 11301-11310; doi:10.3390/s101211301
Article

Pressure Sensing in High-Refractive-Index Liquids Using Long-Period Gratings Nanocoated with Silicon Nitride

1,2,* email, 2email, 2email and 2email
Received: 8 November 2010; in revised form: 6 December 2010 / Accepted: 9 December 2010 / Published: 10 December 2010
(This article belongs to the Section Physical Sensors)
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Abstract: The paper presents a novel pressure sensor based on a silicon nitride (SiNx) nanocoated long-period grating (LPG). The high-temperature, radio-frequency plasma-enhanced chemical-vapor-deposited (RF PECVD) SiNx nanocoating was applied to tune the sensitivity of the LPG to the external refractive index. The technique allows for deposition of good quality, hard and wear-resistant nanofilms as required for optical sensors. Thanks to the SiNx nanocoating it is possible to overcome a limitation of working in the external-refractive-index range, which for a bare fiber cannot be close to that of the cladding. The nanocoated LPG-based sensing structure we developed is functional in high-refractive-index liquids (nD > 1.46) such as oil or gasoline, with pressure sensitivity as high as when water is used as a working liquid. The nanocoating developed for this experiment not only has the highest refractive index ever achieved in LPGs (n > 2.2 at λ = 1,550 nm), but is also the thinnest (
Keywords: optical fiber sensors; pressure sensor; long-period gratings; plasma deposition; thin films; silicon nitride
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MDPI and ACS Style

Smietana, M.; Bock, W.J.; Mikulic, P.; Chen, J. Pressure Sensing in High-Refractive-Index Liquids Using Long-Period Gratings Nanocoated with Silicon Nitride. Sensors 2010, 10, 11301-11310.

AMA Style

Smietana M, Bock WJ, Mikulic P, Chen J. Pressure Sensing in High-Refractive-Index Liquids Using Long-Period Gratings Nanocoated with Silicon Nitride. Sensors. 2010; 10(12):11301-11310.

Chicago/Turabian Style

Smietana, Mateusz; Bock, Wojtek J.; Mikulic, Predrag; Chen, Jiahua. 2010. "Pressure Sensing in High-Refractive-Index Liquids Using Long-Period Gratings Nanocoated with Silicon Nitride." Sensors 10, no. 12: 11301-11310.

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