Next Article in Journal
An Agenda-Based Routing Protocol in Delay Tolerant Mobile Sensor Networks
Next Article in Special Issue
Metaphase FISH on a Chip: Miniaturized Microfluidic Device for Fluorescence in situ Hybridization
Previous Article in Journal
A Feedback-Based Secure Path Approach for Wireless Sensor Network Data Collection
Previous Article in Special Issue
Refractive Index Sensor Based on a 1D Photonic Crystal in a Microfluidic Channel
Sensors 2010, 10(11), 9541-9563; doi:10.3390/s101109541

Novel Designs for Application Specific MEMS Pressure Sensors

* , * ,
Department of Micro- and Nanotechnology, Technical University of Denmark, DTU Nanotech, Building 345E, DK-2800 Kgs. Lyngby, Denmark
* Authors to whom correspondence should be addressed.
Received: 2 August 2010 / Revised: 25 September 2010 / Accepted: 20 October 2010 / Published: 28 October 2010
(This article belongs to the Special Issue State-of-the-Art Sensors Technology in Denmark)
View Full-Text   |   Download PDF [1954 KB, uploaded 21 June 2014]   |  


In the framework of developing innovative microfabricated pressure sensors, we present here three designs based on different readout principles, each one tailored for a specific application. A touch mode capacitive pressure sensor with high sensitivity (14 pF/bar), low temperature dependence and high capacitive output signal (more than 100 pF) is depicted. An optical pressure sensor intrinsically immune to electromagnetic interference, with large pressure range (0–350 bar) and a sensitivity of 1 pm/bar is presented. Finally, a resonating wireless pressure sensor power source free with a sensitivity of 650 KHz/mmHg is described. These sensors will be related with their applications in  harsh environment, distributed systems and medical environment, respectively. For many aspects, commercially available sensors, which in vast majority are piezoresistive, are not suited for the applications proposed.
Keywords: micromachined; pressure; capacitive; optical; wireless; silicon; MEMS; MOEMS micromachined; pressure; capacitive; optical; wireless; silicon; MEMS; MOEMS
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

Share & Cite This Article

Further Mendeley | CiteULike
Export to BibTeX |
EndNote |
MDPI and ACS Style

Fragiacomo, G.; Reck, K.; Lorenzen, L.; Thomsen, E.V. Novel Designs for Application Specific MEMS Pressure Sensors. Sensors 2010, 10, 9541-9563.

View more citation formats

Related Articles

Article Metrics

For more information on the journal, click here


[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert