Reprint
Emerging Micro Manufacturing Technologies and Applications
Edited by
July 2023
162 pages
- ISBN978-3-0365-8213-9 (Hardback)
- ISBN978-3-0365-8212-2 (PDF)
This book is a reprint of the Special Issue Emerging Micro Manufacturing Technologies and Applications that was published in
Chemistry & Materials Science
Engineering
Physical Sciences
Summary
he is a reprint of the Special Issue ’Emerging Micro Manufacturing Technologies and Applications’ published in the journal Micromachines (MDPI). It contains eleven articles, including one Editorial, nine research papers, and one review.
Format
- Hardback
License
© 2022 by the authors; CC BY-NC-ND license
Keywords
multi-beam micromachning; functionalization; tempered glass; gloss reduction; anti-reflection; SOI substrate; cavity-SOI; cavity-BOX; patterned BOX; buried hard-etch mask; flex to rigid (F2R); MEMS; miniaturization; DBS; foldable devices; laser polishing; different surface morphologies; melt hydrodynamics; numerical simulation; alloy wire; processing rate; annealing; strength; elongation; resistivity; tension; silicon nanowires; nanoparticles; Bosch process; anti-reflection; hydrophobicity; very high frequency (VHF); multi-split electrode; low-temperature polysilicon (LTPS); precision processing; electroforming; MEMS; metal structures; deformation; electrical discharge coating; microhardness; material deposition rate; TOPSIS; Fused Deposition Modeling (FDM); acrylonitrile butadiene styrene (ABS); polyamide (Nylon); fatigue; ANCOVA regression analysis; Taguchi analysis; parametric study; numerical study; bonding wire; manufacturability; reliability; general comparison; development trends; n/a