Segmented Control of Electrostatically Actuated Bimorph Beams†
AbstractThis research focused on improving the control and sensing of electrostatically actuated, large deflection bimorph beams for optical beam steering. Current iterations of designs utilize a ‘zipper’ beam and have demonstrated large deflection angles. However, with these devices precise control and deflection measurements can be difficult to achieve. Through using segmented bias channels of doped polysilicon, modeling shows it is possible to control and measure different segments of the actuation arm, thus controlling the amount of tip, tilt, or piston deflection. This paper discusses current and future designs, along with test procedures and modeling results.
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Waggoner, K.; Lake, R.; Starman, L.; Walton, J. Segmented Control of Electrostatically Actuated Bimorph Beams. Proceedings 2017, 1, 306.
Waggoner K, Lake R, Starman L, Walton J. Segmented Control of Electrostatically Actuated Bimorph Beams. Proceedings. 2017; 1(4):306.Chicago/Turabian Style
Waggoner, Kullen; Lake, Robert; Starman, Lavern; Walton, John. 2017. "Segmented Control of Electrostatically Actuated Bimorph Beams." Proceedings 1, no. 4: 306.