Next Article in Journal
Multimodal Neuroimaging Microtool for Infrared Optical Stimulation, Thermal Measurements and Recording of Neuronal Activity in the Deep Tissue
Previous Article in Journal
Segmented Control of Electrostatically Actuated Bimorph Beams
Article Menu
Issue 4 (September) cover image

Article Versions

Export Article

Open AccessProceedings
Proceedings 2017, 1(4), 300; doi:10.3390/proceedings1040300

Driving and Sensing M/NEMS Flexural Vibration Using Dielectric Transduction

Laboratory for Analysis and Architecture of Systems (LAAS-CNRS), Université de Toulouse, CNRS, 7 Avenue du Colonel Roche, F-31400 Toulouse, France
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
*
Author to whom correspondence should be addressed.
Published: 25 August 2017
Download PDF [871 KB, uploaded 26 August 2017]

Abstract

We show that nanometer-scale dielectric thin films can act as efficient electromechanical transducers to simultaneously drive and sense the vibration of the first flexural mode of micro/nano-cantilevers. Here, 16 μm-long, 5 μm-wide and 350 nm-thick cantilevers are actuated by a 15 nm-thick silicon nitride layer, and electrically detected by charge measurement at megahertz frequencies. The displacement was also checked by optical interferometry, and the electromechanical transduction efficiency is extracted and compared to an analytical modelling.
Keywords: MEMS; high-K; dielectric actuation; charge detection MEMS; high-K; dielectric actuation; charge detection
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

Scifeed alert for new publications

Never miss any articles matching your research from any publisher
  • Get alerts for new papers matching your research
  • Find out the new papers from selected authors
  • Updated daily for 49'000+ journals and 6000+ publishers
  • Define your Scifeed now

SciFeed Share & Cite This Article

MDPI and ACS Style

Fuinel, C.; Mathieu, F.; Legrand, B. Driving and Sensing M/NEMS Flexural Vibration Using Dielectric Transduction. Proceedings 2017, 1, 300.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Proceedings EISSN 2504-3900 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top