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Math. Comput. Appl. 2004, 9(1), 91-99; doi:10.3390/mca9010091

A Simple Method for Calculating the Number of Atoms in Ion Implanted Samples from the RBS Yield

Faculty of Arts and Sciences, Physics Department, Celai Bayar University, 45140 Muradiye, Manisa, Turkey
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Published: 1 April 2004
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Abstract

A simple method that computes the number of atoms in implanted samples from the integral of the elastic backseattering yield, using a pocket calculator, is represented. The energy dependence E-2, of the Rutherford law and the screening of the nuclear charge by the electron cloud is considered. The method is based on the assumption that the stopping power is a linearly decreasing function of the energy in the range from 1.4 MeV to 2 MeV. The total yield can be integrated analytically, and the number of atoms in the sample can then be ascertained by an iteration procedure that can be accomplished with a scientific pocket calculator, The results obtained are compared with the values obtained using the computer simulation code for RBS spectra RUMP.
Keywords: RBS; Elastic backscattering; Stopping Power RBS; Elastic backscattering; Stopping Power
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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MDPI and ACS Style

Can, N.; Belik, H. A Simple Method for Calculating the Number of Atoms in Ion Implanted Samples from the RBS Yield. Math. Comput. Appl. 2004, 9, 91-99.

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Math. Comput. Appl. EISSN 2297-8747 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
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