Chemical Vapour Deposition of Gas Sensitive Metal Oxides
Abstract
:1. Introduction
- Precursor supply system
- CVD reactor
- Exhaust system.
- A single step for gas sensor processing which combines both materials synthesis and integration of the material with the sensor platform.
- Production of atomically mixed homogenous materials, including complex stoichiometries, with good reproducibility.
- Ability to influence crystal structure and surface morphology.
2. Gas Sensing Materials
2.1. Tungsten Oxide
2.2. Zinc Oxide
2.3. Tin Oxide
2.4. Complex Oxides
3. Conclusions
Acknowledgments
Conflicts of Interest
References
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Prec. | CVD method | Tdep °C | Form | Features nm | Sensor type | Top °C | ppm | Gas | R | tres s | Ref. |
---|---|---|---|---|---|---|---|---|---|---|---|
W(OCl4) | PE | - | film | - | Ω | 200 | 10 | NO2 | 48 | - | [21] |
WCl6 | AP | 625 | film | 3600T | Ω | 400 | 20 | C2H5OH | 8.5 | - | [20] |
W(CO)6 | LP | 500 | NPs | 140Ø | Ω | >450 | 5000 | H2 | *** | - | [22] |
W | HF | - | NPs | 100Ø | Ω | 50 | 1 | NO2 | 4701 | - | [16] |
WO3 | EB | - | NPs | 9Ø 200T | NS* | 100 | 10 | NH3 | - | - | [18] |
WCMPLX | AA | 500 | P | 1000Ø 30,000T | Ω | 550 | 20 | C2H5OH | 5.1 | - | [27] |
W | HF | 800 | NWs | - | Ω | 450 | 1 | N2O | 4.41 | 175 | [17] |
W(OPh)6 | AAEF | - | NWs | − | Ω | 250 | 0.8 | NO2 | 120 | - | [26] |
W(CO)6 | AAL°c | 580 | NWs | 100–400Ø | Ω | 375 | 80 | CO | 8 | - | [23] |
W(OPh)6 | AA | 400 | NWs | 60–120Ø 7000L | Ω | 150 | 100 | CO | 5 | - | [25] |
W(OPh)6 | AA | 400 | NWs | 60–120Ø 7000L | Ω | 200 | 1 | C6H6 | 2 | 1114 | [29] |
W(CO)6 | AA | 500 | NWs | 50–100Ø 11000L | Ω | 390 | 0.4 | NO2 | 250 | - | [24] |
W(CO)6 | AA | 390 | NWs | 50–100Ø 10,000L | Ω | 190 220 | 100 100 | C7H8 C2H5OH | 3 3.5 | 450 - | [30] |
WO2.9 | CVD | 400 | NRs | 30–110Ø 1000T | O | RT | 65** | H2O | 2.16 | - | [19] |
Prec. | CVD method | Tdep °C | Form | Features nm | Sensor Type | Top °C | ppm | gas | R | tres s | Ref. |
---|---|---|---|---|---|---|---|---|---|---|---|
Et2Zn | MO | - | Film | 130FT | Ω | 300 | 1660 | CO | 1.6 | - | [44] |
Et2Zn | PE | - | Film | 500 FT 38 CZ | Ω +O | RT | 200000 | O2 | 1.8 | - | [45] |
ZnCMPLX | AA | 450 | Film | 25CZ | Ω | 60 | 500 | C2H5OH | 2 | 10 | [51] |
Et2Zn | MO | 450 | NPs | - | Ω | 300 | 1000 | CO | 1.53 | - | [46] |
Zn(OAc)2 | AA | 350 | NPs | 12CZ | Ω | 300 | 10000 | DMA | 1.7 | 240 | [52] |
Zn | CVD | 550 | NWs | 30000Ø | Ω+OSNW | RT | 200 | C2H5OH | 2 | - | [36] |
ZnO | CVD | - | NWs | 130Ø 4000L | Ω+OSNW | 200 | 1×106 | CO | 4 | - | [53] |
Zn | CVD | - | NWs | 80Ø 3500L | FETSNW | - | 400 | CO | 3 | - | [37] |
Zn | UHV | 650 | NWs | 100Ø | Ω+OSNW | RT | 100 | H2 | 1.35 | 3 | [38] |
Et2Zn | MO | 500 | NRs | 100Ø | Ω | 300 | 500 | O2 | 3.5 | - | [47] |
Zn | CVD | 600 | NRs | - | Ω+O | RT | 2.5 | O3 | 1300 | 45 | [39] |
Zn | PE | - | NRs | 100Ø 2000L | Ω | 400 | CH2O | 100 | - | [40] | |
Zn | CVD | 700 | HS | - | Ω | RT | 250 | CO | 1.8 | - | [41] |
Zn | VT | 700 | HS | 800TB 150TC | FETSNW | 200 | 1 | NO2 | 2 | - | [42] |
ZnCMPLX | PE | 300 | HS | Ω | 100 | 0.28 | O3 | 1000 | - | [49] | |
Zn | VT | 410 | HS | 5000Ø | Ω | 400 | 205 | CH2O | 38 | - | [43] |
ZnCMPLX | PE | 300 | HS | Ω | 400 | 5000 | H2 | 14 | - | [50] | |
Zn(NO3)2 | C | 1100 | F | 20000 | Ω SF | 400 | 500 | C2H5OH | 15.3 | - | [48] |
Prec. | CVD method | Tdep, °C | Form | Features, nm | Sensor type | Top °C | ppm | gas | R | tres s | Ref. |
---|---|---|---|---|---|---|---|---|---|---|---|
SnCl2.2H2O | CVD | - | Film | 100T | Ω | - | 6 | NO2 | 1.2 | - | [59] |
TTB | MO | 350 | Film | 50T | Ω | RT | 5 | H2S | 1.1 | - | [63] |
SnCl4 | IBI | RT | Film | 400T | Ω | 500 | - | H2 | - | - | [60] |
SnCl4 | ALD | 250 | Film | 2.6T | Ω | 300 | - | CO | 43 | - | [61] |
TMH | LE | - | NPs | ~15Ø | Ω | 200 | 20 | NO2 | 77 | 160 | [66,67] |
Sn(NO3)4 | Loc | 375 | NPs | - | Ω | - | 200 | CH4O | 5 | - | [64] |
T-crown | AA | 400 | NPs | 18–36Ø | Ω | 300 | 10 | NO2 | 1.7 | - | [65] |
TEH | C | 850 | NPs | 1000Ø | Ω | 300 | 500 | C2H5OH | 1075 | 31 | [68] |
SnCl2.2H2O | CVD | 375 | P | - | Ω | 240 | 300 | H2 | 1.03 | - | [62] |
Sn | CVD | 750 | NWs | - | Ω | 400 | CO | 3.9 | 10 | [56] | |
Sn | CVD | 800 | NWs | 41Ø | ΩSNW | 300 | 500 | NO2 | 17 | 3 | [57] |
DBTA | PE | - | NRs | 1200L 45Øb-10Ø | ΩSNW | 250 | 100 | H2 | 13 | - | [69] |
Sn | CVD | 800 | NWs | 60Ø 20,000L | Ω | 200 | 1 | NO2 | 90 | 8 | [58] |
TTB | CVD | 700 | Plates | 30–40T | Ω | 250 | 100 | C2H5OH | 1.5 | 10 | [55] |
Material | Prec. | CVD Method | Tdep °C | FT nm | Top °C | ppm | gas | R | Ref. |
---|---|---|---|---|---|---|---|---|---|
Co3O4:F | Co(dpm)2 Co(hfa)2·TMEDA | PE | 200 300 400 | 200 | 100 | Acetone | [90] | ||
Cr2O3:Ti | Cr(acac)3 Ti-butoxide | AA | 550 | 150-1000 | [82] | ||||
Cr2O3:Ti | CrO2Cl2 TiCl4 | AP | 400 475 550 | 500 1000 1500 | 400 | 80 | CH3CH2OH | 3.1 1.7 1.1 | [83,84] |
Cr2O3:Ti | Chromium acetate Ti(acac)2OiPr2 | ESAVD | 650 | 200 300400500 | 500 | NH3 | 1.05 1.18 1.22 1.46 | [85,86] | |
In2O3:Ta | InMe3 Ta(NMe2)5 | AA | 550 | 650 | 500 | 100 0.08 | CH3CH2OH NO2 | 16.9 3.01 | [95] |
In2O3:Ti | InMe3 Ti(NMe2)4 | AA | 550 | 790 | 500 | 100 0.08 | CH3CH2OH NO2 | 2.62 1.80 | [95] |
In2O3:Zn | ZnO In2O3 | CVD | 400-550 | RT | 1-5 | CO | [94] | ||
SnO2:In | SnCl4 InCl3 | CVD | 400 | 200 | 50-250 | 1000 | H2 Methanol CO | 1.14 1.23 1.20 | [96,97] |
© 2016 by the authors; licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons by Attribution (CC-BY) license (http://creativecommons.org/licenses/by/4.0/).
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Vallejos, S.; Di Maggio, F.; Shujah, T.; Blackman, C. Chemical Vapour Deposition of Gas Sensitive Metal Oxides. Chemosensors 2016, 4, 4. https://doi.org/10.3390/chemosensors4010004
Vallejos S, Di Maggio F, Shujah T, Blackman C. Chemical Vapour Deposition of Gas Sensitive Metal Oxides. Chemosensors. 2016; 4(1):4. https://doi.org/10.3390/chemosensors4010004
Chicago/Turabian StyleVallejos, Stella, Francesco Di Maggio, Tahira Shujah, and Chris Blackman. 2016. "Chemical Vapour Deposition of Gas Sensitive Metal Oxides" Chemosensors 4, no. 1: 4. https://doi.org/10.3390/chemosensors4010004