Empirical-Statistical Study on the Relationship between Deposition Parameters, Process Variables, Deposition Rate and Mechanical Properties of a-C:H:W Coatings
Abstract
:1. Introduction
2. Experimental Section
2.1. Specimens and Deposition Process
2.2. Coating Characterization
2.3. Design of Experiments and Statistical Methods
ID | Point type | A: (W) | B: (V) | C: ϕ(Ar) (sccm) | D: ϕ(C2H2) (sccm) |
---|---|---|---|---|---|
V01 | cube | 1,042 | 57 | 128 | 16 |
V02 | cube | 1,358 | 57 | 128 | 16 |
V03 | cube | 1,042 | 203 | 128 | 16 |
V04 | cube | 1,358 | 203 | 128 | 16 |
V05 | cube | 1,042 | 57 | 232 | 16 |
V06 | cube | 1,358 | 57 | 232 | 16 |
V07 | cube | 1,042 | 203 | 232 | 16 |
V08 | cube | 1,358 | 203 | 232 | 16 |
V09 | cube | 1,042 | 57 | 128 | 40 |
V10 | cube | 1,358 | 57 | 128 | 40 |
V11 | cube | 1,042 | 203 | 128 | 40 |
V12 | cube | 1,358 | 203 | 128 | 40 |
V13 | cube | 1,042 | 57 | 232 | 40 |
V14 | cube | 1,358 | 57 | 232 | 40 |
V15 | cube | 1,042 | 203 | 232 | 40 |
V16 | cube | 1,358 | 203 | 232 | 40 |
V17 | star | 903 | 130 | 180 | 28 |
V18 | star | 1,480 | 130 | 180 | 28 |
V19 | star | 1,200 | 1* | 180 | 28 |
V20 | star | 1,200 | 259 | 180 | 28 |
V21 | star | 1,200 | 130 | 88 | 28 |
V22 | star | 1,200 | 130 | 272 | 28 |
V23 | star | 1,200 | 130 | 180 | 7 |
V24 | star | 1,200 | 130 | 180 | 49 |
V25 | center | 1,200 | 130 | 180 | 28 |
WC | reference | 1,200 | 130 | 180 | 0 |
3. Results
3.1. Measured Process Variables
3.2. Architecture and Microstructure of the Coatings
3.3. Deposition Rate
3.4. Mechanical Properties
4. Statistical Evaluation and Discussion
4.1. Measured Process Variables
4.1.1. Total Pressure
4.1.2. Sputtering Voltage
- a low argon flow rate ,
- a high sputtering power and/or
- a medium value of the ethine flow rate ,
4.1.3. Bias Current
4.2. Deposition Rate
4.3. Young’s Modulus and Indentation Hardness
4.3.1. Effect of the Ethine Flow Rate
4.3.2. Effects of the Bias Voltage and the Argon Flow Rate
4.3.3. Effect of the Sputtering Power
4.4. Ratio
5. Graphical Summary of the Empirical-Statistical Relationships by Contour Line Plots
6. Conclusions
7. Outlook
Acknowledgments
Author Contributions
Conflicts of Interest
References
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Hetzner, H.; Schmid, C.; Tremmel, S.; Durst, K.; Wartzack, S. Empirical-Statistical Study on the Relationship between Deposition Parameters, Process Variables, Deposition Rate and Mechanical Properties of a-C:H:W Coatings. Coatings 2014, 4, 772-795. https://doi.org/10.3390/coatings4040772
Hetzner H, Schmid C, Tremmel S, Durst K, Wartzack S. Empirical-Statistical Study on the Relationship between Deposition Parameters, Process Variables, Deposition Rate and Mechanical Properties of a-C:H:W Coatings. Coatings. 2014; 4(4):772-795. https://doi.org/10.3390/coatings4040772
Chicago/Turabian StyleHetzner, Harald, Christoph Schmid, Stephan Tremmel, Karsten Durst, and Sandro Wartzack. 2014. "Empirical-Statistical Study on the Relationship between Deposition Parameters, Process Variables, Deposition Rate and Mechanical Properties of a-C:H:W Coatings" Coatings 4, no. 4: 772-795. https://doi.org/10.3390/coatings4040772