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Coatings 2014, 4(4), 772-795; doi:10.3390/coatings4040772

Empirical-Statistical Study on the Relationship between Deposition Parameters, Process Variables, Deposition Rate and Mechanical Properties of a-C:H:W Coatings

1
Engineering Design, Friedrich-Alexander-Universität Erlangen-Nürnberg, Martensstraße 9, D-91058 Erlangen, Germany
2
Physical Metallurgy, Technische Universität Darmstadt, Allarich-Weiss-Straße 2, D-64287 Darmstadt, Germany
*
Author to whom correspondence should be addressed.
Received: 22 October 2014 / Revised: 28 October 2014 / Accepted: 8 December 2014 / Published: 15 December 2014
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Abstract

Tungsten-modified hydrogenated amorphous carbon coatings (a-C:H:W) were deposited on high speed steel by reactive magnetron sputtering of a tungsten carbide target in an argon-ethine atmosphere. The deposition parameters, sputtering power, bias voltage, argon and ethine flow rate, were varied according to a central composite design comprising 25 different parameter combinations. For comparison, a tungsten carbide coating was deposited, as well. During coating deposition, the process variables, total pressure, sputtering voltage and bias current, were measured as process characteristics. The thickness of the deposited coatings was determined using the crater grinding method, and the deposition rate was calculated. Young’s modulus E and indentation hardness HIT were characterized by means of nanoindentation. With E = 80 View Full-Text
Keywords: a-C:H:W; nanocomposite coating; design of experiments; hardness; Young’s modulus; H=E ratio a-C:H:W; nanocomposite coating; design of experiments; hardness; Young’s modulus; H=E ratio
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Hetzner, H.; Schmid, C.; Tremmel, S.; Durst, K.; Wartzack, S. Empirical-Statistical Study on the Relationship between Deposition Parameters, Process Variables, Deposition Rate and Mechanical Properties of a-C:H:W Coatings. Coatings 2014, 4, 772-795.

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