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Nanomaterials 2018, 8(6), 422; https://doi.org/10.3390/nano8060422

A Thin Film Flexible Supercapacitor Based on Oblique Angle Deposited Ni/NiO Nanowire Arrays

1
Engineering Research Center for Semiconductor Integrated Technology, Institute of Semiconductors, Chinese Academy of Science, Beijing 100083, China
2
College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 101408, China
3
School of Electronic, Electronical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 101408, China
4
State Key Laboratory for Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
5
School of Microelectronics, University of Chinese Academy of Sciences, Beijing 101408, China
*
Author to whom correspondence should be addressed.
Received: 1 June 2018 / Revised: 8 June 2018 / Accepted: 9 June 2018 / Published: 11 June 2018
(This article belongs to the Special Issue Metallic Nanostructures)
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Abstract

With high power density, fast charging-discharging speed, and a long cycling life, supercapacitors are a kind of highly developed novel energy-storage device that has shown a growing performance and various unconventional shapes such as flexible, linear-type, stretchable, self-healing, etc. Here, we proposed a rational design of thin film, flexible micro-supercapacitors with in-plane interdigital electrodes, where the electrodes were fabricated using the oblique angle deposition technique to grow oblique Ni/NiO nanowire arrays directly on polyimide film. The obtained electrodes have a high specific surface area and good adhesion to the substrate compared with other in-plane micro-supercapacitors. Meanwhile, the as-fabricated micro-supercapacitors have good flexibility and satisfactory energy-storage performance, exhibiting a high specific capacity of 37.1 F/cm3, a high energy density of 5.14 mWh/cm3, a power density of up to 0.5 W/cm3, and good stability during charge-discharge cycles and repeated bending-recovery cycles, respectively. Our micro-supercapacitors can be used as ingenious energy storage devices for future portable and wearable electronic applications. View Full-Text
Keywords: flexible; NiO; oblique angle deposition; supercapacitor flexible; NiO; oblique angle deposition; supercapacitor
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Ma, J.; Liu, W.; Zhang, S.; Ma, Z.; Song, P.; Yang, F.; Wang, X. A Thin Film Flexible Supercapacitor Based on Oblique Angle Deposited Ni/NiO Nanowire Arrays. Nanomaterials 2018, 8, 422.

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