Nanomaterials 2012, 2(4), 312-328; doi:10.3390/nano2040312
Article

Simultaneous Patterning of Independent Metal/Metal Oxide Multi-Layer Films Using Two-Tone Photo-Acid Generating Compound Systems

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Received: 29 June 2012; in revised form: 20 September 2012 / Accepted: 24 September 2012 / Published: 16 October 2012
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Abstract: (1) The photo-induced solubility and positive-tone direct photo-patterning of iron, copper and lanthanides chelated with 4-(2-nitrobenzyloxycarbonyl)catechol (NBOC) or 4-(6-nitroveratryloxycarbonyl)catechol (NVOC) was investigated. Photo-patterning of iron, copper, cerium, samarium, europium, terbium, dysprosium, holmium, erbium and lutetium complexes was accomplished. Continuous films were formed by the pyrolysis of metal complex films at 500 °C. (2) Based on the difference in the photo-reaction excitation wavelength profile of NBOC and NVOC complexes, a short and simple method for simultaneous micro-patterning of two independent films on each side of a transparent glass substrate was developed. Using the developed procedure, indium tin oxide and/or titanium oxide films were formed on each side of a quartz substrate without use of resist or etching.
Keywords: photo-patterning; direct patterning; multi-layer films; multi-touch panel; iron; copper; lanthanides
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MDPI and ACS Style

Cordonier, C.E.J.; Honma, H. Simultaneous Patterning of Independent Metal/Metal Oxide Multi-Layer Films Using Two-Tone Photo-Acid Generating Compound Systems. Nanomaterials 2012, 2, 312-328.

AMA Style

Cordonier CEJ, Honma H. Simultaneous Patterning of Independent Metal/Metal Oxide Multi-Layer Films Using Two-Tone Photo-Acid Generating Compound Systems. Nanomaterials. 2012; 2(4):312-328.

Chicago/Turabian Style

Cordonier, Christopher E.J.; Honma, Hideo. 2012. "Simultaneous Patterning of Independent Metal/Metal Oxide Multi-Layer Films Using Two-Tone Photo-Acid Generating Compound Systems." Nanomaterials 2, no. 4: 312-328.

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