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Appl. Sci. 2018, 8(2), 233; https://doi.org/10.3390/app8020233

High-Power, Solid-State, Deep Ultraviolet Laser Generation

1
The Institute for Solid State Physics, the University of Tokyo, Kashiwanoha 5-1-5, Kashiwa, Chiba 277-8581, Japan
2
GIGAPHOTON INC., 400 Yokokurashinden, Oyama, Tochigi 323-8558, Japan
*
Author to whom correspondence should be addressed.
Received: 8 November 2017 / Revised: 29 January 2018 / Accepted: 30 January 2018 / Published: 3 February 2018
(This article belongs to the Special Issue Solid State Lasers Materials, Technologies and Applications)
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Abstract

At present, deep ultraviolet (DUV) lasers at the wavelength of fourth harmonics of 1 μm (266 nm/258 nm) and at the wavelength of 193 nm are widely utilized in science and industry. We review the generation of these DUV lasers by nonlinear frequency conversion processes using solid-state/fiber lasers as the fundamental frequency. A DUV laser at 258 nm by fourth harmonics generation (FHG) could achieve an average power of 10 W with a beam quality of M2 < 1.5. Moreover, 1 W of average power at 193 nm was obtained by sum-frequency generation (SFG). A new concept of 193-nm DUV laser generation by use of the diamond Raman laser is also introduced. A proof-of-principle experiment of the diamond Raman laser is reported with the conversion efficiency of 23% from the pump to the second Stokes wavelength, which implies the potential to generate a higher power 193 nm DUV laser in the future. View Full-Text
Keywords: deep ultraviolet laser; frequency conversion; Raman laser deep ultraviolet laser; frequency conversion; Raman laser
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Xuan, H.; Igarashi, H.; Ito, S.; Qu, C.; Zhao, Z.; Kobayashi, Y. High-Power, Solid-State, Deep Ultraviolet Laser Generation. Appl. Sci. 2018, 8, 233.

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