Opto-Acoustic Method for the Characterization of Thin-Film Adhesion
Abstract
:1. Introduction
2. Theory
2.1. Elasticity of the Film-Substrate Interface
2.2. Opto-Acoustic Method
2.2.1 Michelson Interferometer
2.2.2. Principle of Operation
2.2.3. Proof of Principle
3. Experimental Section
3.1. Preliminary Experiment with Doppler Vibrometry
3.2. Analysis on Ti-Si Thin-Film Specimens with the Acousto-Optical Method
3.2.1. Treated and Untreated Specimens
3.2.2. Observation of Resonance-Like Behavior
3.2.3. Detailed Analysis on Ti-Pt Resonance
3.2.4. Long-Term Temporal Change in the Valley Frequencies
3.2.5. Resonant Frequency
3.3. Possible Mechanism of the Observed Elastic Behavior
4. Conclusions
Acknowledgments
Author Contributions
Conflicts of Interest
References
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Specimen | Untreated | Treated |
---|---|---|
2.2 | 0.62 | |
δ (rad) | 1.63 | −0.52 |
(kHz) | 58.5 | 49.5 |
γ (1/s) | 0.115 | 0.82 |
Film material | Ti | Ti-Au | Ti-Pt |
---|---|---|---|
T (nm) | 75 | ||
ρ (kg/m) | 4510 | 4510/19,030 | 4510/21,450 |
M (kg) | |||
mass ratio | 1 |
Specimen | Valley 1 | Valley 2 | ||
---|---|---|---|---|
Treated | Untreated | Treated | Untreated | |
Ti-only | 13.0 | 14.5 | 22.5 | 27.0 |
Ti-Pt | 5.2 | 5.8 | 9.0 | 10.8 |
Ti-Au | 5.4 | 6.0 | 9.4 | 11.3 |
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Yoshida, S.; Didie, D.R.; Didie, D.; Sasaki, T.; Park, H.-S.; Park, I.-K.; Gurney, D. Opto-Acoustic Method for the Characterization of Thin-Film Adhesion. Appl. Sci. 2016, 6, 163. https://doi.org/10.3390/app6060163
Yoshida S, Didie DR, Didie D, Sasaki T, Park H-S, Park I-K, Gurney D. Opto-Acoustic Method for the Characterization of Thin-Film Adhesion. Applied Sciences. 2016; 6(6):163. https://doi.org/10.3390/app6060163
Chicago/Turabian StyleYoshida, Sanichiro, David R. Didie, Daniel Didie, Tomohiro Sasaki, Hae-Sung Park, Ik-Keun Park, and David Gurney. 2016. "Opto-Acoustic Method for the Characterization of Thin-Film Adhesion" Applied Sciences 6, no. 6: 163. https://doi.org/10.3390/app6060163