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Micromachines 2018, 9(8), 410; https://doi.org/10.3390/mi9080410

Design and Fabrication of a Visible-Light-Compatible, Polymer-Based Photonic Crystal Resonator and Waveguide for Sensing Applications

1
Department of Applied Chemistry, Osaka Prefecture University, Osaka 599-8531, Japan
2
Japan Science and Technology Agency (JST) Precursory Research for Embryonic Science and Technology (PRESTO), Tokyo 102-8666, Japan
*
Author to whom correspondence should be addressed.
Received: 29 May 2018 / Revised: 2 August 2018 / Accepted: 14 August 2018 / Published: 17 August 2018
(This article belongs to the Special Issue State-of-the-Art Lab-on-a-Chip Technology in Japan)
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Abstract

In this paper, we have proposed a polymer-based photonic crystal (PhC) resonator, with multiple sizes of cavities, and a waveguide to be used as highly sensitive optical sensor components. Properties of the proposed PhC were simulated by the finite-difference time-domain method, and the polymer-based PhC resonator and waveguide were fabricated on a photoresist (polymer) by electron beam lithography, which was prepared on an Au-layer-deposited Si substrate. We detected the resonant light that penetrated through the waveguide and was trapped in the PhC resonator. Optical characteristics of the fabricated PhC were evaluated by detecting the polymer layer deposition process by using the layer-by-layer (LbL) method to deposit polymer layers. As a result, by using an optimized design of a polymer-based PhC resonator with a long cavity (equivalent to a defect of three holes), the PhC structure changes caused by LbL deposition lead to changes in resonant light wavelength (peak shift: 5.26 nm/layer). Therefore, we suggest that a PhC resonator and a waveguide is applicable as an optical sensor. View Full-Text
Keywords: photonic crystal; resonator; waveguide; layer-by-layer method; optical sensor photonic crystal; resonator; waveguide; layer-by-layer method; optical sensor
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).
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Sun, J.; Maeno, K.; Aki, S.; Sueyoshi, K.; Hisamoto, H.; Endo, T. Design and Fabrication of a Visible-Light-Compatible, Polymer-Based Photonic Crystal Resonator and Waveguide for Sensing Applications. Micromachines 2018, 9, 410.

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