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Micromachines 2018, 9(8), 408; https://doi.org/10.3390/mi9080408

A Mini-System Integrated with Metal-Oxide-Semiconductor Sensor and Micro-Packed Gas Chromatographic Column

1
State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China
2
School of Science, Minzu University of China, Beijing 100081, China
*
Authors to whom correspondence should be addressed.
Received: 28 May 2018 / Revised: 28 July 2018 / Accepted: 7 August 2018 / Published: 17 August 2018
(This article belongs to the Special Issue Nanostructure Based Sensors for Gas Sensing: from Devices to Systems)
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Abstract

In this work, a mini monitoring system integrated with a microfabricated metal oxide array sensor and a micro packed gas chromatographic (GC) column was developed for monitoring environmental gases. The microfabricated packed GC column with a 1.6 m length was used to separate the environmental gas, and the metal oxide semiconductor (MOS) array sensor, fabricated with nano-sized SnO-SnO2 sensitive materials, was able to effectively detect each component separated by GC column. The results demonstrate that the monitoring system can detect environmental gas with high precision. View Full-Text
Keywords: packed gas chromatographic column; metal-oxide-semiconductor array sensor; sensitive material; environmental monitoring packed gas chromatographic column; metal-oxide-semiconductor array sensor; sensitive material; environmental monitoring
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).
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Sun, J.; Geng, Z.; Xue, N.; Liu, C.; Ma, T. A Mini-System Integrated with Metal-Oxide-Semiconductor Sensor and Micro-Packed Gas Chromatographic Column. Micromachines 2018, 9, 408.

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