Anti-Reflectance Optimization of Secondary Nanostructured Black Silicon Grown on Micro-Structured Arrays
Abstract
:1. Introduction
2. Fabrication
3. Experimental
4. Results and Discussion
5. Conclusions
Author Contributions
Funding
Conflicts of Interest
References
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Number | Tips | Pits | ||
---|---|---|---|---|
a1 (μm) | d1 (μm) | a2 (μm) | d2 (μm) | |
1 | 100 | 100 | 30 | 4.2 |
2 | 200 | 100 | 60 | 8.4 |
3 | 300 | 100 | 120 | 16.8 |
4 | 400 | 100 | 180 | 33.6 |
5 | 500 | 100 | 240 | 50.4 |
Tip Sample Number | #1 (Depth) μm | #2 (Depth) μm | #3 (Depth) μm | #4 (Depth) μm |
No. 1 | 24 | 32 | 40 | 48 |
No. 2 | 24 | 32 | 40 | 48 |
No. 3 | 24 | 32 | 40 | 48 |
No. 4 | 24 | 32 | 40 | 48 |
No. 5 | 24 | 32 | 40 | 48 |
Pit Sample Number | #5 (Depth) μm | #6 (Depth) μm | #7 (Depth) μm | #8 (Depth) μm |
No. 1 | 20 | 21 | 22 | 23 |
No. 2 | 30 | 32 | 34 | 36 |
No. 3 | 40 | 43 | 46 | 49 |
No. 4 | 50 | 56 | 62 | 68 |
No. 5 | 60 | 68 | 76 | 84 |
Tips | #1 (Depth) μm | #2 (Depth) μm | #3 (Depth) μm | #4 (Depth) μm |
1 | 24.2 | 32.2 | 40.1 | 47.9 |
2 | 24.3 | 32.3 | 40.2 | 47.6 |
3 | 24.1 | 32.2 | 40.2 | 47.8 |
4 | 24.4 | 32.3 | 40.1 | 47.6 |
5 | 24.2 | 32.1 | 40.3 | 47.7 |
Pits | #5 (width/depth) μm | #6 (width/depth) μm | #7 (width/depth) μm | #8 (width/depth) μm |
1 | 18.2/17.9 | 18.3/18.1 | 18.5/18.2 | 18.5/18.2 |
2 | 22.2/23.0 | 27.8/31.1 | 26.8/33.0 | 32.8/33.6 |
3 | 56.9/35.2 | 46.6/42.2 | 51.7/44.8 | 69.3/46.7 |
4 | 87.4/52.0 | 96.3/61.3 | 107.9/63.7 | 117.1/72.6 |
5 | 109.7/55 | 127.3/69.3 | 140.9/80.0 | 148.9/83.7 |
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Tan, X.; Tao, Z.; Yu, M.; Wu, H.; Li, H. Anti-Reflectance Optimization of Secondary Nanostructured Black Silicon Grown on Micro-Structured Arrays. Micromachines 2018, 9, 385. https://doi.org/10.3390/mi9080385
Tan X, Tao Z, Yu M, Wu H, Li H. Anti-Reflectance Optimization of Secondary Nanostructured Black Silicon Grown on Micro-Structured Arrays. Micromachines. 2018; 9(8):385. https://doi.org/10.3390/mi9080385
Chicago/Turabian StyleTan, Xiao, Zhi Tao, Mingxing Yu, Hanxiao Wu, and Haiwang Li. 2018. "Anti-Reflectance Optimization of Secondary Nanostructured Black Silicon Grown on Micro-Structured Arrays" Micromachines 9, no. 8: 385. https://doi.org/10.3390/mi9080385