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Micromachines 2018, 9(5), 241; https://doi.org/10.3390/mi9050241

Hysteresis Compensation and Sliding Mode Control with Perturbation Estimation for Piezoelectric Actuators

1
Department of Electromechanical Engineering, University of Macau, Taipa, Macao 999078, China
2
Department of Industrial and Systems Engineering, The Hong Kong Polytechnic University, Hung Hom, Hong Kong 999077, China
3
Tianjin Key Laboratory for Advanced Mechatronic System Design and Intelligent Control, Tianjin University of Technology, Tianjin 300384, China
*
Author to whom correspondence should be addressed.
Received: 28 March 2018 / Revised: 11 May 2018 / Accepted: 15 May 2018 / Published: 16 May 2018
(This article belongs to the Section Micro-/Nano-system and Technology)
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Abstract

Based on the background of atomic force microscope (AFM) driven by piezoelectric actuators (PEAs), this paper proposes a sliding mode control coupled with an inverse Bouc–Wen (BW) hysteresis compensator to improve the positioning performance of PEAs. The intrinsic hysteresis and creep characteristics degrade the performance of the PEA and cause accuracy loss. Although creep effect can be eliminated by the closed-loop control approach, hysteresis effects need to be compensated and alleviated by hysteresis compensators. For the purpose of dealing with the estimation errors, unmodeled vibration, and disturbances, a sliding mode control with perturbation estimation (SMCPE) method is adopted to enhance the performance and robustness of the system. In order to validate the feasibility and performance of the proposed method, experimental studies are carried out, and the results show that the proposed controller performs better than a proportional-integral-derivative (PID) controller at 1 and 2 Hz, reducing error to 1.2% and 1.4%, respectively. View Full-Text
Keywords: micro-positioning; hysteresis compensation; sliding mode control; perturbation estimation micro-positioning; hysteresis compensation; sliding mode control; perturbation estimation
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).
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Ding, B.; Li, Y. Hysteresis Compensation and Sliding Mode Control with Perturbation Estimation for Piezoelectric Actuators. Micromachines 2018, 9, 241.

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