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Micromachines 2018, 9(4), 185; doi:10.3390/mi9040185

Research and Analysis of MEMS Switches in Different Frequency Bands

School of Electro-Mechanical Engineering, Xidian University, Number 2 Taibai South Road, Xi’an 710071, China
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Received: 29 January 2018 / Revised: 22 March 2018 / Accepted: 12 April 2018 / Published: 15 April 2018
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Abstract

Due to their high isolation, low insertion loss, high linearity, and low power consumption, microelectromechanical systems (MEMS) switches have drawn much attention from researchers in recent years. In this paper, we introduce the research status of MEMS switches in different bands and several reliability issues, such as dielectric charging, contact failure, and temperature instability. In this paper, some of the following methods to improve the performance of MEMS switches in high frequency are summarized: (1) utilizing combinations of several switches in series; (2) covering a float metal layer on the dielectric layer; (3) using dielectric layer materials with high dielectric constants and conductor materials with low resistance; (4) developing MEMS switches using T-match and π-match; (5) designing MEMS switches based on bipolar complementary metal–oxide–semiconductor (BiCMOS) technology and reconfigurable MEMS’ surfaces; (6) employing thermal compensation structures, circularly symmetric structures, thermal buckle-beam actuators, molybdenum membrane, and thin-film packaging; (7) selecting Ultra-NanoCrystalline diamond or aluminum nitride dielectric materials and applying a bipolar driving voltage, stoppers, and a double-dielectric-layer structure; and (8) adopting gold alloying with carbon nanotubes (CNTs), hermetic and reliable packaging, and mN-level contact. View Full-Text
Keywords: microelectromechanical systems (MEMS) switch; isolation; insertion loss; dielectric charging; contact failure; temperature-stable microelectromechanical systems (MEMS) switch; isolation; insertion loss; dielectric charging; contact failure; temperature-stable
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Tian, W.; Li, P.; Yuan, L. Research and Analysis of MEMS Switches in Different Frequency Bands. Micromachines 2018, 9, 185.

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