PDMS-PDMS Micro Channels Filled with Phase-Change Material for Chip Cooling
Abstract
:1. Introduction
2. Materials and Methods
2.1. Fabrication of the Mold Master
2.2. Fabrication of PDMS Microchannels
2.3. Injection with Phase-Change Material
3. Results and Evaluation of the Cooling Performance
4. Conclusions
Supplementary Materials
Acknowledgments
Author Contributions
Conflicts of Interest
References
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Liu, Z.; Qin, S.; Chen, X.; Chen, D.; Wang, F. PDMS-PDMS Micro Channels Filled with Phase-Change Material for Chip Cooling. Micromachines 2018, 9, 165. https://doi.org/10.3390/mi9040165
Liu Z, Qin S, Chen X, Chen D, Wang F. PDMS-PDMS Micro Channels Filled with Phase-Change Material for Chip Cooling. Micromachines. 2018; 9(4):165. https://doi.org/10.3390/mi9040165
Chicago/Turabian StyleLiu, Zong, Siyin Qin, Xingwei Chen, Dazhu Chen, and Fei Wang. 2018. "PDMS-PDMS Micro Channels Filled with Phase-Change Material for Chip Cooling" Micromachines 9, no. 4: 165. https://doi.org/10.3390/mi9040165