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Micromachines 2018, 9(3), 120; https://doi.org/10.3390/mi9030120

Design, Fabrication, and Performance Characterization of LTCC-Based Capacitive Accelerometers

1
National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing 100871, China
2
Institute of Information Microsystem, Beijing Information Science and Technology University, Beijing 100085, China
3
China Electronics Technology Group Corporation No. 54 Research Institute, Hebei 050081, China
4
Shenzhen Graduate School of Peking University, Shenzhen 518055, China
*
Author to whom correspondence should be addressed.
Received: 28 December 2017 / Revised: 28 February 2018 / Accepted: 7 March 2018 / Published: 9 March 2018
(This article belongs to the Special Issue MEMS Accelerometers)
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Abstract

In this paper, two versions of capacitive accelerometers based on low-temperature co-fired ceramic (LTCC) technology are developed, different with respect to the detection technique, as well as the mechanical structure. Fabrication of the key structure, a heavy proof mass with thin beams embedded in a large cavity, which is extremely difficult for the conventional LTCC process, is successfully completed by the optimized process. The LC resonant accelerometer, using coupling resonance frequency sensing which is first applied to LTCC accelerometer and may facilitate application in harsh environments, demonstrates a sensitivity of 375 KHz/g over the full scale range 1 g, with nonlinearity less than 6%, and the telemetry distance is 5 mm. The differential capacitive accelerometer adopting differential capacitive sensing presents a larger full scale range 10 g and lower nonlinearity less than 1%, and the sensitivity is 30.27 mV/g. View Full-Text
Keywords: low-temperature co-fired ceramic (LTCC); capacitive accelerometer; wireless; process optimization; performance characterization low-temperature co-fired ceramic (LTCC); capacitive accelerometer; wireless; process optimization; performance characterization
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).
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Liu, H.; Fang, R.; Miao, M.; Zhang, Y.; Yan, Y.; Tang, X.; Lu, H.; Jin, Y. Design, Fabrication, and Performance Characterization of LTCC-Based Capacitive Accelerometers. Micromachines 2018, 9, 120.

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