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Micromachines 2018, 9(2), 61; doi:10.3390/mi9020061

Fabrication of Electromagnetically-Driven Tilted Microcoil on Polyimide Capillary Surface for Potential Single-Fiber Endoscope Scanner Application

1
National Key Laboratory of Science and Technology on Micro/Nano Fabrication, School of Electronics Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
2
Institute of Biomedical and Health Engineering, Shenzhen Institute of Advanced Technology, Chinese Academy of Science, Shenzhen 518055, China
3
Graduate School of Systems Life Science, Kyushu University, Fukuoka 819-0395, Japan
*
Author to whom correspondence should be addressed.
Received: 25 December 2017 / Revised: 17 January 2018 / Accepted: 26 January 2018 / Published: 1 February 2018
(This article belongs to the Special Issue MEMS Technology for Biomedical Imaging Applications)
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Abstract

The design and fabrication of a Micro-electromechanical Systems (MEMS)-based tilted microcoil on a polyimide capillary are reported in this paper, proposed for an electromagnetically-driven single-fiber endoscope scanner application. The parameters of the tilted microcoil were optimized by simulation. It is proved that the largest driving force could be achieved when the tilt-angle, the pitch and the coil turns of the designed microcoil were 60°, 80 µm and 20, respectively. The modal simulation of the designed fiber scanner was carried out. The prototypes of the tilted microcoils were fabricated on the surface of polyimide capillary with 1 mm-diameter using our developed cylindrical projection lithography system. The dimensions of the two tilted microcoils were as follows: one was tilt-angle 45°, line width 10 ± 0.2 µm, coil pitch 78.5 ± 0.5 µm, and the other was tilt-angle 60°, line width 10 ± 0.2 µm, coil pitch 81.5 ± 0.5 µm. Finally, a direct mask-less electroplating process was employed to fabricate the copper microcoil with 15 µm thickness on the gold (Au) seed-layer, and the corresponding line width was expanded to 40 µm. View Full-Text
Keywords: tilted microcoil; electromagnetically-driven; surface micromachining; polyimide capillary; MEMS tilted microcoil; electromagnetically-driven; surface micromachining; polyimide capillary; MEMS
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Yang, Z.; Shi, J.; Sun, B.; Yao, J.; Ding, G.; Sawada, R. Fabrication of Electromagnetically-Driven Tilted Microcoil on Polyimide Capillary Surface for Potential Single-Fiber Endoscope Scanner Application. Micromachines 2018, 9, 61.

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