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Micromachines 2017, 8(8), 252; doi:10.3390/mi8080252

Optofluidic Lab-on-a-Chip Fluorescence Sensor Using Integrated Buried ARROW (bARROW) Waveguides

1
Electrical and Computer Engineering, Brigham Young University, Provo, UT 84602, USA
2
Baskin School of Engineering, University of California, Santa Cruz, Santa Cruz, CA 95064, USA
*
Author to whom correspondence should be addressed.
Received: 26 July 2017 / Revised: 9 August 2017 / Accepted: 14 August 2017 / Published: 17 August 2017
(This article belongs to the Special Issue Photonic MEMS and Optofluidic Devices)
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Abstract

Optofluidic, lab-on-a-chip fluorescence sensors were fabricated using buried anti-resonant reflecting optical waveguides (bARROWs). The bARROWs are impervious to the negative water absorption effects that typically occur in waveguides made using hygroscopic, plasma-enhanced chemical vapor deposition (PECVD) oxides. These sensors were used to detect fluorescent microbeads and had an average signal-to-noise ratio (SNR) that was 81.3% higher than that of single-oxide ARROW fluorescence sensors. While the single-oxide ARROW sensors were annealed at 300 °C to drive moisture out of the waveguides, the bARROW sensors required no annealing process to obtain a high SNR. View Full-Text
Keywords: optofluidics; lab-on-a-chip; fluorescence sensing; PECVD; SiO2; water absorption optofluidics; lab-on-a-chip; fluorescence sensing; PECVD; SiO2; water absorption
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Wall, T.; McMurray, J.; Meena, G.; Ganjalizadeh, V.; Schmidt, H.; Hawkins, A.R. Optofluidic Lab-on-a-Chip Fluorescence Sensor Using Integrated Buried ARROW (bARROW) Waveguides. Micromachines 2017, 8, 252.

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