Nanomechanical Motion Transducers for Miniaturized Mechanical Systems
AbstractReliable operation of a miniaturized mechanical system requires that nanomechanical motion be transduced into electrical signals (and vice versa) with high fidelity and in a robust manner. Progress in transducer technologies is expected to impact numerous emerging and future applications of micro- and, especially, nanoelectromechanical systems (MEMS and NEMS); furthermore, high-precision measurements of nanomechanical motion are broadly used to study fundamental phenomena in physics and biology. Therefore, development of nanomechanical motion transducers with high sensitivity and bandwidth has been a central research thrust in the fields of MEMS and NEMS. Here, we will review recent progress in this rapidly-advancing area. View Full-Text
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Kouh, T.; Hanay, M.S.; Ekinci, K.L. Nanomechanical Motion Transducers for Miniaturized Mechanical Systems. Micromachines 2017, 8, 108.
Kouh T, Hanay MS, Ekinci KL. Nanomechanical Motion Transducers for Miniaturized Mechanical Systems. Micromachines. 2017; 8(4):108.Chicago/Turabian Style
Kouh, Taejoon; Hanay, M. S.; Ekinci, Kamil L. 2017. "Nanomechanical Motion Transducers for Miniaturized Mechanical Systems." Micromachines 8, no. 4: 108.
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