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Micromachines 2017, 8(3), 78; doi:10.3390/mi8030078

Fast-Response Electrostatic Actuator Based on Nano-Gap

Lab Thin Ferroelectric Films Structure, Institute of Automation and Electrometry, Russian Academy of Science, Siberian Branch, Koptug Prosp.1, Novosibirsk 630090, Russia
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Academic Editor: Andreas Richter
Received: 27 December 2016 / Revised: 22 February 2017 / Accepted: 28 February 2017 / Published: 3 March 2017
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Abstract

The possibility of constructing new high-performance electrostatic fast actuators based on energy transformation in nanometer gaps is considered. The construction and the properties of the operation of such devices as well as their typical parameters are described. The drives are based on ferroelectrics with high values of dielectric permittivity (above 1000). They can be constructed using microelectronic technology. It is demonstrated that the actuators are capable of maintaining forces with a specific density up to 106 N/m2 and up to 100–1000 N in real devices for 10–100 µs. Experimental research results of such actuators are presented. View Full-Text
Keywords: electrostatic actuator; large force; nanometer gap; ferroelectric; fast driver electrostatic actuator; large force; nanometer gap; ferroelectric; fast driver
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Kostsov, E.; Sokolov, A. Fast-Response Electrostatic Actuator Based on Nano-Gap. Micromachines 2017, 8, 78.

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