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Micromachines 2017, 8(2), 44; doi:10.3390/mi8020044

Suspended Graphene-Based Gas Sensor with 1-mW Energy Consumption

1
Department of Mechanical Engineering; University of Utah, Salt Lake City, UT 84112, USA
2
Department of Mechanical Engineering; University of Nebraska–Lincoln, Lincoln, NE 68588, USA; zhou@unl.edu
*
Author to whom correspondence should be addressed.
Received: 28 December 2016 / Accepted: 24 January 2017 / Published: 1 February 2017
(This article belongs to the Special Issue Flexible and Stretchable Electronics)
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Abstract

This paper presents NH3 sensing with ultra-low energy consumption for fast recovery and a graphene sheet based on a suspended microheater. Sensitivity and repeatability are important characteristics of functional gas sensors embedded in mobile devices. Moreover, low energy consumption is an essential requirement in flexible and stretchable mobile electronics due to their small dimension and fluctuating resistivity during mechanical behavior. In this paper, we introduce a graphene-based ultra-low power gas detection device with integration of a suspended silicon heater. Dramatic power reduction is enabled by a duty cycle while not sacrificing sensitivity. The new oscillation method of heating improves the sensitivity of 0.049 (ΔR/R0) measured at a flow rate of 18.8 sccm NH3(g) for 70 s. Our experimental tests show that a 60% duty cycle does not sacrifice sensitivity or recovery by dropping the total power consumption from 1.76 mW to 1.05 mW. The aforementioned low energy consuming gas sensor platform not only attracts environmentally-related industries, but also has the potential to be applied to flexible and stretchable mobile electronic devices. View Full-Text
Keywords: graphene; sensor; heater; NH3; oscillation; pulse; sensitivity; recovery; energy; flexible graphene; sensor; heater; NH3; oscillation; pulse; sensitivity; recovery; energy; flexible
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Kim, J.-H.; Zhou, Q.; Chang, J. Suspended Graphene-Based Gas Sensor with 1-mW Energy Consumption. Micromachines 2017, 8, 44.

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