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Micromachines 2017, 8(2), 42;

Z-Axis Micromachined Tuning Fork Gyroscope with Low Air Damping

International Training Institute for Materials Science, Hanoi University of Science and Technology, Hanoi 100000, Vietnam
Faculty of Electronic and Electrical Engineering, Hung Yen University of Technology and Education, Hung Yen 160000, Vietnam
Authors to whom correspondence should be addressed.
Received: 14 December 2016 / Accepted: 20 January 2017 / Published: 1 February 2017
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This paper reports on the design and fabrication of a z-axis tuning fork gyroscope which has a freestanding architecture. In order to improve the performance of the tuning fork gyroscope by eliminating the influence of the squeeze-film air damping, the driving and sensing parts of the gyroscope were designed to oscillate in-plane. Furthermore, by removing the substrate underneath the device, the slide-film air damping in the gap between the proof masses and the substrate was eliminated. The proposed architecture was analyzed by the finite element method using ANSYS software. The simulated frequencies of the driving and sensing modes were 9.788 and 9.761 kHz, respectively. The gyroscope was fabricated using bulk micromachining technology. The quality factor and sensitivity of the gyroscope operating in atmospheric conditions were measured to be 111.2 and 11.56 mV/°/s, respectively. View Full-Text
Keywords: Bulk micromachining; Tuning fork gyroscope; Finite element analysis Bulk micromachining; Tuning fork gyroscope; Finite element analysis

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Nguyen, M.N.; Ha, N.S.; Nguyen, L.Q.; Chu, H.M.; Vu, H.N. Z-Axis Micromachined Tuning Fork Gyroscope with Low Air Damping. Micromachines 2017, 8, 42.

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