Locally-Actuated Graphene-Based Nano-Electro-Mechanical Switch
AbstractThe graphene nano-electro-mechanical switches are promising components due to their outstanding switching performance. However, most of the reported devices suffered from a large actuation voltages, hindering them from the integration in the conventional complementary metal-oxide-semiconductor (CMOS) circuit. In this work, we demonstrated the graphene nano-electro-mechanical switches with the local actuation electrode via conventional nanofabrication techniques. Both cantilever-type and double-clamped beam switches were fabricated. These devices exhibited the sharp switching, reversible operation cycles, high on/off ratio, and a low actuation voltage of below 5 V, which were compatible with the CMOS circuit requirements. View Full-Text
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Sun, J.; Muruganathan, M.; Kanetake, N.; Mizuta, H. Locally-Actuated Graphene-Based Nano-Electro-Mechanical Switch. Micromachines 2016, 7, 124.
Sun J, Muruganathan M, Kanetake N, Mizuta H. Locally-Actuated Graphene-Based Nano-Electro-Mechanical Switch. Micromachines. 2016; 7(7):124.Chicago/Turabian Style
Sun, Jian; Muruganathan, Manoharan; Kanetake, Nozomu; Mizuta, Hiroshi. 2016. "Locally-Actuated Graphene-Based Nano-Electro-Mechanical Switch." Micromachines 7, no. 7: 124.
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