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Micromachines 2016, 7(7), 124; doi:10.3390/mi7070124

Locally-Actuated Graphene-Based Nano-Electro-Mechanical Switch

1
School of Material Science, Japan Advanced Institute of Science and Technology, Nomi 923-1211, Japan
2
Advanced Device Laboratory, RIKEN, Wako 351-0198, Japan
3
Nanoelectronics and Nanotechnologies Research Group, Faculty of Physical Sciences and Engineering, University of Southampton, High Field, Southampton SO17 1BJ, UK
*
Authors to whom correspondence should be addressed.
Academic Editor: Nam-Trung Nguyen
Received: 31 May 2016 / Revised: 29 June 2016 / Accepted: 14 July 2016 / Published: 19 July 2016
(This article belongs to the Special Issue Graphene Nano-Electro-Mechanical (NEM) Devices and Applications)
View Full-Text   |   Download PDF [1637 KB, uploaded 19 July 2016]   |  

Abstract

The graphene nano-electro-mechanical switches are promising components due to their outstanding switching performance. However, most of the reported devices suffered from a large actuation voltages, hindering them from the integration in the conventional complementary metal-oxide-semiconductor (CMOS) circuit. In this work, we demonstrated the graphene nano-electro-mechanical switches with the local actuation electrode via conventional nanofabrication techniques. Both cantilever-type and double-clamped beam switches were fabricated. These devices exhibited the sharp switching, reversible operation cycles, high on/off ratio, and a low actuation voltage of below 5 V, which were compatible with the CMOS circuit requirements. View Full-Text
Keywords: graphene; nano-electro-mechanical system; nano-electro-mechanical switch; nanofabrication graphene; nano-electro-mechanical system; nano-electro-mechanical switch; nanofabrication
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Sun, J.; Muruganathan, M.; Kanetake, N.; Mizuta, H. Locally-Actuated Graphene-Based Nano-Electro-Mechanical Switch. Micromachines 2016, 7, 124.

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