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Micromachines 2015, 6(8), 1135-1142; doi:10.3390/mi6081135

Multiple Silicon Nanowires with Enzymatic Modification for Measuring Glucose Concentration

Department of Photonics Engineering, Yuan Ze University, 135, Yuan-Tung Road, Chung-Li 32003, Taiwan
Department of Mechanical and Electromechanical Engineering, Tamkang University, New Taipei 25137, Taiwan
These authors contributed equally to this work.
Author to whom correspondence should be addressed.
Academic Editor: Joost Lötters
Received: 10 July 2015 / Revised: 3 August 2015 / Accepted: 6 August 2015 / Published: 14 August 2015
View Full-Text   |   Download PDF [3077 KB, uploaded 14 August 2015]   |  


This study fabricated a multiple poly-Si nanowires sensor through a top-down method and immobilized glucose oxidase on the multiple nanowires for determining glucose concentration. The proposed sensor is 340 nm in width and uses five physically identical and parallel nanowires. The sensor contained nanowires of various lengths (3, 5, and 10 μm). Experimental results showed that sensor sensitivity is inversely proportional to nanowire length. The sensor with 3 μm in nanowire length exhibited a theoretical resolution of 0.003 mg/dL and the highest sensitivity of 0.03 μA/(mg/dL). Furthermore, the proposed sensor retains this performance when reused for up to 10 applications. View Full-Text
Keywords: multiple nanowires; glucose sensor; enzymatic modification; top-down method multiple nanowires; glucose sensor; enzymatic modification; top-down method

Figure 1

This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Hsu, C.-C.; Liao, Y.-C.; Tsai, Y.-T.; Yeh, H.-I.; Wu, C.-C. Multiple Silicon Nanowires with Enzymatic Modification for Measuring Glucose Concentration. Micromachines 2015, 6, 1135-1142.

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