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Micromachines 2015, 6(11), 1597-1605; doi:10.3390/mi6111443

Multifunctional Platform with CMOS-Compatible Tungsten Microhotplate for Pirani, Temperature, and Gas Sensor

Key Laboratory of Liaoning for Integrated Circuits Technology, School of Electronic Science and Technology, Dalian University of Technology, Dalian 116024, China
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Academic Editor: Ching-Liang Dai
Received: 26 July 2015 / Revised: 16 October 2015 / Accepted: 20 October 2015 / Published: 28 October 2015
(This article belongs to the Special Issue CMOS-MEMS Sensors and Devices)
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Abstract

A multifunctional platform based on the microhotplate was developed for applications including a Pirani vacuum gauge, temperature, and gas sensor. It consisted of a tungsten microhotplate and an on-chip operational amplifier. The platform was fabricated in a standard complementary metal oxide semiconductor (CMOS) process. A tungsten plug in standard CMOS process was specially designed as the serpentine resistor for the microhotplate, acting as both heater and thermister. With the sacrificial layer technology, the microhotplate was suspended over the silicon substrate with a 340 nm gap. The on-chip operational amplifier provided a bias current for the microhotplate. This platform has been used to develop different kinds of sensors. The first one was a Pirani vacuum gauge ranging from 1-1 to 105 Pa. The second one was a temperature sensor ranging from -20 to 70 °C. The third one was a thermal-conductivity gas sensor, which could distinguish gases with different thermal conductivities in constant gas pressure and environment temperature. In the fourth application, with extra fabrication processes including the deposition of gas-sensitive film, the platform was used as a metal-oxide gas sensor for the detection of gas concentration. View Full-Text
Keywords: multifunctional platform; microhotplate; Pirani sensor; temperature sensor; gas sensor multifunctional platform; microhotplate; Pirani sensor; temperature sensor; gas sensor
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Wang, J.; Yu , J. Multifunctional Platform with CMOS-Compatible Tungsten Microhotplate for Pirani, Temperature, and Gas Sensor. Micromachines 2015, 6, 1597-1605.

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