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Micromachines 2012, 3(1), 28-35; doi:10.3390/mi3010028
Article

A Study on Millimetre-Wave Tunable Bandpass Filter Based on Polymer Cap Deflection

* ,
,
 and
IEMN CNRS 8520/Cité Scientifique-Avenue Poincare BP 60069, 59652 Villeneuve d’Ascq Cedex, France
* Author to whom correspondence should be addressed.
Received: 29 November 2011 / Revised: 28 December 2011 / Accepted: 29 December 2011 / Published: 6 January 2012
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Abstract

This paper presents a new tuning mechanism for millimetre-wave BPF based on deflection of the BCB membrane of BCB packaging cap. A 3-pole parallel-coupled microstrip filter operating at 60 GHz is first implemented on 30 µm-thick BCB polymer substrate and then BCB-capped through our new anti-adhesion layer assisted wafer-level transfer technique. Gold electrodes are fabricated on top of the BCB cap for DC actuation. The implemented BCB capped BPF showed the tuning range of 1.49 GHz from 63.36 GHz to 64.85 GHz with the associated insertion losses of −9.7 dB and −9.4 dB and the return losses better than −11 dB over the tuning range.
Keywords: BCB polymer; filter; tuning; millimeter-wave BCB polymer; filter; tuning; millimeter-wave
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Seok, S.; Kim, J.; Rolland, N.; Rolland, P.-A. A Study on Millimetre-Wave Tunable Bandpass Filter Based on Polymer Cap Deflection. Micromachines 2012, 3, 28-35.

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