Recent Advances in MEMS Metasurfaces and Their Applications on Tunable Lens
Abstract
:1. Introduction
2. Microelectromechanical Systems (MEMS) Metasurfaces
2.1. Dynamic Modulation of Frequency, Amplitude, and Polarization State
2.2. Controllable Absorption and Emission
2.3. Reconfigurable Wavefront Manipulation
2.4. Fabrication Methods of MEMS and Microfluidic Metasurfaces
2.5. Summary of MEMS and Microfluidic Metasurfaces
3. Tunable Lens Based on MEMS Metasurfaces
4. Summary and Outlook
Author Contributions
Funding
Acknowledgments
Conflicts of Interest
References
- Pan, Y.M.; Hu, P.; Zhang, X.Y. A low-profile high-gain and wideband filtering antenna with metasurface. IEEE Trans. Antennas Propag. 2016, 64, 2010–2016. [Google Scholar] [CrossRef]
- Sima, B.; Behdad, N. A reflective-type, quasi-optical metasurface filter. J. Appl. Phys. 2017, 122, 064901. [Google Scholar] [CrossRef]
- Holsteen, A.L.; Raza, S.; Fan, P.; Kik, P.G.; Brongersma, M.L. Purcell effect for active tuning of light scattering from semiconductor optical antennas. Science 2017, 358, 1407–1410. [Google Scholar] [CrossRef] [PubMed] [Green Version]
- Jacobsen, R.E.; Lavrinenko, A.V.; Arslanagic, S. Water-based metasurfaces for effective switching of microwaves. IEEE Antennas Wirel. Propag. Lett. 2018, 17, 571–574. [Google Scholar] [CrossRef]
- Sun, Y.; Ling, Y.; Liu, T.J. Electro-optical switch based on continuous metasurface embedded in si substrate. AIP Adv. 2015, 5, 117221. [Google Scholar] [CrossRef]
- Tao, Y.; Shu, H. Numerical investigation of the linearity of graphene-based silicon waveguide modulator. Opt. Express 2019, 27, 9013–9031. [Google Scholar] [CrossRef] [PubMed]
- Yao, Y.; Shankar, R.; Kates, M.A. Electrically tunable metasurface perfect absorbers for ultrathin mid-infrared optical modulators. Nano Lett. 2014, 14, 6526–6532. [Google Scholar] [CrossRef]
- Akselrod, G.M.; Huang, J. Large-area metasurface perfect absorbers from visible to near-infrared. Adv. Mater. 2015, 27, 8028–8034. [Google Scholar] [CrossRef]
- Odebo Lank, N.; Verre, R.; Johansson, P. Large-scale silicon nanophotonic metasurfaces with polarization independent near-perfect absorption. Nano Lett. 2017, 17, 3054–3060. [Google Scholar] [CrossRef]
- Zhao, Y.; Alu, A. Manipulating light polarization with ultrathin plasmonic metasurfaces. Phys. Rev. B 2011, 84, 205428. [Google Scholar] [CrossRef]
- Zhao, Y.; Alu, A. Broadband circular polarizers using plasmonic metasurfaces. In Proceedings of the 2011 IEEE International Symposium on Antennas and Propagation, Spokane, WA, USA, 3–8 July 2011. [Google Scholar]
- Yu, N.; Genevet, P.; Kates, M.A. Light propagation with phase discontinuities: Generalized laws of reflection and refraction. Science 2011, 334, 333–337. [Google Scholar] [CrossRef] [PubMed]
- Wei, Z.; Cao, Y.; Su, X.P. Highly efficient beam steering with a transparent metasurface. Opt. Express 2013, 21, 10739–10745. [Google Scholar] [CrossRef] [PubMed]
- Ding, F.; Deshpande, R. Bifunctional gap-plasmon metasurfaces for visible light: Polarization-controlled unidirectional surface plasmon excitation and beam steering at normal incidence. Light Sci. Appl. 2018, 7, 17178. [Google Scholar] [CrossRef] [PubMed]
- Aieta, F.; Genevet, P. Aberration-free ultrathin flat lenses and axicons at telecom wavelengths based on plasmonic metasurfaces. Nano Lett. 2012, 12, 4932–4936. [Google Scholar] [CrossRef] [PubMed]
- Li, Y.; Zhang, J. Broadband unidirectional cloaks based on flat metasurface focusing lenses. J. Phys. D Appl. Phys. 2015, 48, 335101. [Google Scholar] [CrossRef]
- Khorasaninejad, M.; Capasso, F. Metalenses: Versatile multifunctional photonic components. Science 2017, 358. [Google Scholar] [CrossRef] [PubMed]
- Zhang, J.; Wang, X. Flat dielectric metasurface lens array for three dimensional integral imaging. Opt. Commun. 2018, 414, 1–4. [Google Scholar] [CrossRef]
- Zhu, W.M.; Song, Q.H. Tunable flat lens based on microfluidic reconfigurable metasurface. In Proceedings of the International Conference on Solid-State Sensors, Actuators and Microsystems, Anchorage, AK, USA, 25–29 June 2015. [Google Scholar]
- Yang, Q.; Gu, J. Efficient flat metasurface lens for terahertz imaging. Opt. Express 2014, 22, 25931–25939. [Google Scholar] [CrossRef]
- Azad, A.K.; Efimov, A.V.; Ghosh, S. Ultra-thin metasurface microwave flat lens for broadband applications. Appl. Phys. Lett. 2017, 110, 224101. [Google Scholar] [CrossRef] [Green Version]
- Gao, L.H.; Cheng, Q.; Jing, Y. Broadband diffusion of terahertz waves by multi-bit coding metasurfaces. Light Sci. Appl. 2015, 4, e324. [Google Scholar] [CrossRef]
- Mei, J.; Wu, Y. Controllable transmission and total reflection through an impedance-matched acoustic metasurface. New J. Phys. 2014, 16, 123007. [Google Scholar] [CrossRef]
- Orazbayev, B.; Mohammadi Estakhri, N.; Beruete, M.; Alu, A. Terahertz carpet cloak based on a ring resonator metasurface. Phys. Rev. B 2015, 91, 195444. [Google Scholar] [CrossRef]
- Xu, H.X.; Tang, S.; Ma, S.; Luo, W.; Cai, T.; Sun, S. Tunable microwave metasurfaces for high-performance operations: Dispersion compensation and dynamical switch. Sci. Rep. UK 2016, 6, 38255. [Google Scholar] [CrossRef] [PubMed]
- Wang, S.; Wang, X.; Kan, Q.; Ye, J.S.; Feng, S.F.; Sun, W.F.; Han, P.; Qu, S.L.; Zhang, Y. Spin-selected focusing and imaging based on metasurface lens. Opt. Express 2015, 23, 26434–26441. [Google Scholar] [CrossRef] [PubMed]
- Zhu, Y.F.; Zou, X.Y.; Liang, B.; Cheng, J.C. Acoustic one-way open tunnel by using metasurface. Appl. Phys. Lett. 2015, 107, 113501. [Google Scholar] [CrossRef] [Green Version]
- Raeis Hosseini, N.; Rho, J. Metasurfaces based on phase-change material as a reconfigurable platform for multifunctional devices. Materials 2017, 10, 1046. [Google Scholar] [CrossRef]
- Wuttig, M.; Bhaskaran, H.; Taubner, T. Phase-change materials for non-volatile photonic applications. Nat. Photonics 2017, 11, 465–476. [Google Scholar] [CrossRef]
- Cheng, J.; Fan, F.; Cheng, S.J. Recent progress on graphene-functionalized metasurfaces for tunable phase and polarization control. Nanomaterials (Basel) 2019, 9, 398. [Google Scholar] [CrossRef]
- Oliveri, G.; Werner, D.H.; Massa, A. Reconfigurable electromagnetics through metamaterials—A review. Proc. IEEE 2015, 103, 1034–1056. [Google Scholar] [CrossRef]
- Chen, H.T.; Padilla, W.J.; Joshua, M.O.; Gossard, A.C.; Taylor, A.J.; Averitt, R.D. Active terahertz metamaterial devices. Nature 2006, 444, 597–600. [Google Scholar] [CrossRef] [Green Version]
- Fan, Y.; Shen, N.H.; Koschny, T.; Soukoulis, C.M. Tunable terahertz meta-surface with graphene cut-wires. ACS Photonics 2015, 2, 151–156. [Google Scholar] [CrossRef]
- Karl, N.; Reichel, K. An electrically driven terahertz metamaterial diffractive modulator with more than 20 db of dynamic range. Appl. Phys. Lett. 2014, 104, 091115. [Google Scholar] [CrossRef]
- Lewi, T.; Evans, H.A.; Butakov, N.A.; Schuller, J.A. Ultrawide thermo-optic tuning of pbte meta-atoms. Nano Lett. 2017, 17, 3940–3945. [Google Scholar] [CrossRef]
- Malek, S.C.; Ee, H.S. Strain multiplexed metasurface holograms on a stretchable substrate. Nano Lett. 2017, 17, 3641–3645. [Google Scholar] [CrossRef]
- Liu, X.; Padilla, W.J. Reconfigurable room temperature metamaterial infrared emitter. Optica 2017, 4, 430–433. [Google Scholar] [CrossRef]
- Liu, X.; Padilla, W.J. Thermochromic infrared metamaterials. Adv. Mater. 2016, 28, 871–875. [Google Scholar] [CrossRef]
- Jiang, Y.; Liu, Z.; Matsuhisa, N.; Qi, D.P.; Leow, W.R.; Yang, H.; Yu, J.C.; Chen, G.; Liu, Y.Q.; Wan, C.J. Auxetic mechanical metamaterials to enhance sensitivity of stretchable strain sensors. Adv. Mater. 2018, 30, 1706589. [Google Scholar] [CrossRef]
- Li, J.; Shah, C.M. Mechanically tunable terahertz metamaterials. Appl. Phys. Lett. 2013, 102, 121101. [Google Scholar] [CrossRef] [Green Version]
- Pryce, I.M.; Aydin, K.; Kelaita, Y.A.; Briggs, R.M.; Atwater, H.A. Highly strained compliant optical metamaterials with large frequency tunability. Nano Lett. 2010, 10, 4222–4227. [Google Scholar] [CrossRef]
- Liu, M.; Susli, M.; Silva, D.; Putrino, G.; Kala, H.; Fan, S.; Cole, M.; Faraone, L.; Wallace, V.P.; Padilla, W.J.; et al. Ultrathin tunable terahertz absorber based on MEMS-driven metamaterial. Microsyst. Nanoeng. 2017, 3, 17033. [Google Scholar] [CrossRef] [Green Version]
- Reeves, J.B.; Jayne, R.K.; Stark, T.J.; Barrett, L.K. Tunable infrared metasurface on a soft polymer scaffold. Nano Lett. 2018, 18, 2802–2806. [Google Scholar] [CrossRef]
- Karim, M.F.; Liu, A.Q.; Stark, T.J.; Barrett, L.K.; White, A.E.; Bishop, D.J. A tunable bandstop filter via the capacitance change of micromachined switches. J. Micromech. Microeng. 2006, 16, 851–861. [Google Scholar] [CrossRef]
- Han, Z.L.; Kohno, K.; Fujita, H.; Hirakawa, K.; Toshiyoshi, H. MEMS reconfigurable metamaterial for terahertz switchable filter and modulator. Opt. Express 2014, 22, 21326–21339. [Google Scholar] [CrossRef]
- Zhang, M.; Zhang, W.; Liu, A.Q.; Li, F.C.; Lan, C.F. Tunable polarization conversion and rotation based on a reconfigurable metasurface. Sci. Rep. UK 2017, 7, 12068. [Google Scholar] [CrossRef]
- Guo, B.S.; Loo, Y.L.; Ong, C.K. Polarization independent and tunable plasmonic structure for mimicking electromagnetically induced transparency in the reflectance spectrum. J. Opt. 2017, 19, 105101. [Google Scholar] [CrossRef]
- Qian, Z.; Kang, S.; Rajaram, V.; Cassella, C.; Mcgruer, N.E.; Rinaldi, M. Zero-power infrared digitizers based on plasmonically enhanced micromechanical photoswitches. Nat. Nanotechnol. 2017, 12, 969–973. [Google Scholar] [CrossRef]
- Mao, Y.; Pan, Y.; Zhu, R.; Xu, J.; Wu, W.G. Multi-direction-tunable three-dimensional meta-atoms for reversible switching between midwave and long-wave infrared regimes. Nano Lett. 2016, 16, 7025–7029. [Google Scholar] [CrossRef]
- Fuchi, K.; Diaz, A.R.; Rothwell, E.J.; Ouedraogo, R.O.; Tang, J.Y. An origami tunable metamaterial. J. Appl. Phys. 2012, 111, 084905. [Google Scholar] [CrossRef]
- Tao, H.; Strikwerda, A.C.; Fan, K.B.; Padilla, W.J.; Zhang, X.; Averitt, R.D. MEMS based structurally tunable metamaterials at terahertz frequencies. J. Infrared Millim. Terahertz Waves 2010, 32, 580–595. [Google Scholar] [CrossRef]
- Zhu, W.M.; Song, Q.H.; Yan, L.B.; Zhang, W.; Wu, P.C.; Chin, L.K.; Cai, H.; Tsai, D.P.; Shen, Z.X.; Deng, T.W.; et al. A flat lens with tunable phase gradient by using random access reconfigurable metamaterial. Adv. Mater. 2015, 27, 4739–4743. [Google Scholar] [CrossRef]
- Padilla, W.J.; Taylor, A.J.; Highstrete, C.; Lee, M.; Averitt, R.D. Dynamical electric and magnetic metamaterial response at terahertz frequencies. Phys. Rev. Lett. 2006, 96, 107401. [Google Scholar] [CrossRef]
- Shcherbakov, M.R.; Liu, S.; Zubyuk, V.V.; Vaskin, A.; Vabishchevich, P.P.; Keeler, G.; Pertsch, T.; Dolgova, T.V.; Staude, I.; Brener, I.; et al. Ultrafast all-optical tuning of direct-gap semiconductor metasurfaces. Nat. Commun. 2017, 8, 17. [Google Scholar] [CrossRef]
- Song, Q.H.; Zhang, W.; Cai, H.; Gu, Y.D.; Wu, P.C.; Zhu, W.M.; Liang, Q.X.; Yang, Z.C.; An, Y.F.; Hao, Y.L.; et al. A Tunable Metamaterial for Wide-Angle and Broadband Absorption through Meta-Water-Capsule Coatings. In Proceedings of the IEEE Conference on Lasers and Electro-Optics (CLEO), San Jose, CA, USA, 5–10 June 2016. [Google Scholar]
- Wilson, S.A.; Jourdain, R.P.J. New materials for micro-scale sensors and actuators: A engineering review. Mater. Sci. Eng. R Rep. 2007, 56, 121–129. [Google Scholar] [CrossRef]
- Zhang, W.M.; Yan, H.; Peng, Z.K.; Meng, G. Electrostatic pull-in instability in MEMS/NEMS: A review. Sens. Actuator A. Phys. 2014, 214, 187–218. [Google Scholar] [CrossRef]
- Zhu, W.M.; Liu, A.Q.; Zhang, X.M.; Tsai, D.P.; Bourouina, T.; Teng, J.H.; Zhang, X.H.; Guo, H.C.; Tanoto, H.; Mei, T.; et al. Switchable magnetic metamaterials using micromachining processes. Adv. Mater. 2011, 23, 1792–1796. [Google Scholar] [CrossRef]
- Tao, H.; Strikwerda, A.C.; Fan, K.; Padilla, W.J.; Zhang, X.; Averitt, R.D. Reconfigurable terahertz metamaterials. Phys. Rev. Lett. 2009, 103, 147401. [Google Scholar] [CrossRef]
- Ou, J.Y.; Plum, E.; Zhang, J.F.; Zheludev, N.I. An electromechanically reconfigurable plasmonic metamaterial operating in the near-infrared. Nat. Nanotechnol. 2013, 8, 252–255. [Google Scholar] [CrossRef]
- Ou, J.Y.; Plum, E.; Jiang, L.D.; Zheludev, N.I. Reconfigurable photonic metamaterials. Nano Lett. 2011, 11, 2142–2144. [Google Scholar] [CrossRef]
- Craighead, H.G.; Roukes, M.L. Nanoelectromechanical systems. Science 2005, 76, 307–316. [Google Scholar] [CrossRef]
- Zhu, W.M.; Liu, A.Q.; Bourouina, T.; Tsai, D.P.; Teng, J.H.; Zhang, X.H.; Lo, G.Q.; Kwong, D.L.; Zheludev, N.I. Microelectromechanical maltese-cross metamaterial with tunable terahertz anisotropy. Nat. Commun. 2012, 3, 1274. [Google Scholar] [CrossRef]
- Zhu, W.M.; Liu, A.Q.; Zhang, W.; Tao, J.F.; Bourouina, T.; Teng, J.H.; Zhang, X.H.; Wu, Q.Y.; Tanoto, H.; Guo, H.C.; et al. Polarization dependent state to polarization independent state change in Thz metamaterials. Appl. Phys. Lett. 2011, 99, 221102. [Google Scholar] [CrossRef]
- Zhao, X.; Schalch, J.; Zhang, J.D.; Seren, H.R.; Duan, G.W.; Averitt, R.D.; Zhang, X. Electromechanically tunable metasurface transmission waveplate at terahertz frequencies. Optical 2018, 5, 303. [Google Scholar] [CrossRef]
- Cong, L.Q.; Xu, N.N.; Han, J.G.; Zhang, W.L.; Singh, R. A tunable dispersion-free terahertz metadevice with pancharatnam-berry-phase-enabled modulation and polarization control. Adv. Mater. 2015, 27, 6630–6636. [Google Scholar] [CrossRef]
- Wu, P.C.; Zhu, W.M.; Shen, Z.X.; Chong, P.H.J.; Ser, W.; Tsai, D.P.; Liu, A.Q. Broadband wide-angle multifunctional polarization converter via liquid-metal-based metasurface. Adv. Opt. Mater. 2017, 5, 1600938. [Google Scholar] [CrossRef]
- Yan, L.; Zhu, W.M.; Karim, M.F.; Cai, H.; Gu, A.Y.; Shen, Z.X.; Chong, P.H.J.; Tsai, D.P.; Kwong, D.L.; Qiu, C.W.; et al. Arbitrary and independent polarization control in situ via a single metasurface. Adv. Opt. Mater. 2018, 6, 1800728. [Google Scholar] [CrossRef]
- Song, Q.H.; Zhu, W.M.; Wu, P.C.; Zhang, W.; Wu, Q.Y.S.; Teng, J.H.; Shen, Z.X.; Chong, P.H.J.; Liang, Q.X.; Yang, Z.C.; et al. Liquid-metal-based metasurface for terahertz absorption material: Frequency-agile and wide-angle. APL Mater. 2017, 5, 066103. [Google Scholar] [CrossRef] [Green Version]
- Song, Q.; Zhang, W.; Wu, P.C.; Zhu, W.M.; Shen, Z.X.; Chong, P.H.J.; Liang, Q.X.; Yang, Z.C.; Hao, Y.L.; Cai, H.; et al. Water-resonator-based metasurface: An ultrabroadband and near-unity absorption. Adv. Opt. Mater. 2017, 5, 160113. [Google Scholar] [CrossRef]
- Yin, X.; Zhu, H.; Guo, H.J.; Deng, M.; Xu, T.; Gong, Z.J.; Li, X.; Hang, Z.H.; Wu, C.; Li, H.Q.; et al. Hyperbolic metamaterial devices for wavefront manipulation. Laser Photonics Rev. 2019, 13, 180081. [Google Scholar] [CrossRef]
- Sterner, M.; Chicherin, D.; Raisenen, A.V.; Stemme, G.; Oberhammer, J. RF MEMS high-impedance tunable metamaterials for millimeter wave-beam steering. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems, Sorrento, Italy, 25–29 January 2009. [Google Scholar]
- Debogovic, T.; Perruisseau Carrier, J. MEMS-reconfigurable metamaterials and antenna applications. Int. J. Antennas Propag. 2014, 2014, 1–8. [Google Scholar] [CrossRef]
- Yan, L.; Wu, P.C.; Zhu, W.M.; Song, Q.H.; Zhang, W.; Tsai, D.P.; Capasso, F.; Liu, A.Q. Microfluidic metasurface with high tunability for multi-function: Dispersion compensation and beam tracking. In Proceedings of the IEEE International Conference on Lasers and Electro-Optics (CLEO), San Jose, CA, USA, 5–10 June 2016. [Google Scholar]
- She, A.; Zhang, S.Y.; Shian, S.; Clarke, D.R.; Capasso, F. Adaptive metalenses with simultaneous electrical control of focal length, astigmatism, and shift. Sci. Adv. 2018, 4, 9957. [Google Scholar] [CrossRef]
- Zhong, J.; An, N.; Zhong, J.; An, N.; Yi, N.B.; Zhu, M.X.; Song, Q.H.; Xiao, S.M. Broadband and tunable-focus flat lens with dielectric metasurface. Plasmonics 2015, 11, 537–541. [Google Scholar] [CrossRef]
- Yu, N.; Capasso, F. Flat optics with designer metasurfaces. Nat. Mater. 2014, 13, 39–50. [Google Scholar] [CrossRef] [PubMed]
- Xu, Y.; Li, Y.; Cao, L.Y.; Yang, Z.C.; Zhou, X.L. Steering of sh wave propagation in electrorheological elastomer with a structured meta-slab by tunable phase discontinuities. AIP Adv. 2017, 7, 095144. [Google Scholar] [CrossRef]
- Kamali, S.M.; Arbabi, E.; Arbabi, A.; Horie, Y.; Faraon, A. Highly tunable elastic dielectric metasurface lenses. Laser Photonics Rev. 2016, 1002–1008. [Google Scholar] [CrossRef]
- Song, Q.H.; Zhu, W.M.; Zhang, W.; Wu, P.; Shen, Z. Tunable metamaterial lens array via metadroplets. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems, Estoril, Portugal, 18–22 January 2015. [Google Scholar]
- Zhu, W.M.; Song, Q.H.; Zhang, W.; Wu, P.C.; Yan, L.B.; Huang, R.F.; Ting, S.K.; Liu, A.Q. Microfluidic reconfigurable metasurface: A demonstration of tunable focusing from near field to far field. In Proceedings of the IEEE International Conference on Lasers and Electro-Optics (CLEO), San Jose, CA, USA, 10–15 May 2015. [Google Scholar]
- Wan, W.; Gao, J.; Yang, X.D. Full-color plasmonic metasurface holograms. ACS Nano 2016, 10, 10671–10680. [Google Scholar] [CrossRef] [PubMed]
- Huang, K.; Dong, Z.G.; Mei, S.T.; Zhang, L.; Liu, Y.J.; Liu, H.; Zhu, H.B.; Teng, J.H.; Luk’yanchuk, B.; Yang, J.K.W.; et al. Silicon multi-meta-holograms for the broadband visible light. Laser Photonics Rev. 2016, 10, 500–509. [Google Scholar] [CrossRef]
- Ni, X.; Kildishev, A.V.; Shalaev, V.M. Metasurface holograms for visible light. Nat. Commun. 2013, 4, 2807. [Google Scholar] [CrossRef]
- Roy, T.; Zhang, S.; Jung, I.W.; Troccoli, M.; Capasso, F.; Lopez, D. Dynamic metasurface lens based on mems technology. APL Photonics 2018, 3, 021302. [Google Scholar] [CrossRef]
- Horie, Y.; Arbabi, A.; Arbabi, E.; Karnali, S.M.; Faraon, A. High-speed, phase-dominant spatial light modulation with silicon-based active resonant antennas. ACS Photonics 2017, 5, 1711–1717. [Google Scholar] [CrossRef]
- Yan, L.B.; Zhu, W.M.; Wu, P.C.; Cai, H.; Gu, Y.D.; Chin, L.K.; Shen, Z.X.; Chong, P.H.J.; Yang, Z.C.; Ser, W.; et al. Adaptable metasurface for dynamic anomalous reflection. Appl. Phys. Lett. 2017, 110, 201904. [Google Scholar] [CrossRef]
- Arbabi, E.; Arbabi, A.; Kamali, S.M.; Horie, Y.; Faraji-Dana, M.S.; Faraon, A. MEMS-tunable dielectric metasurface lens. Nat. Commun. 2018, 9, 812. [Google Scholar] [CrossRef] [PubMed]
- Zou, Y.; Zhang, W.; Chau, F.S.; Zhou, G.Y. Miniature adjustable-focus endoscope with a solid electrically tunable lens. Opt. Express 2015, 23, 20582–20592. [Google Scholar] [CrossRef] [PubMed]
- Ee, H.S.; Agarwal, R. Tunable metasurface and flat optical zoom lens on a stretchable substrate. Nano Lett. 2016, 16, 2818–2823. [Google Scholar] [CrossRef] [PubMed]
- Wu, C.H.; Arju, N.; Kelp, G.; Fan, J.A.; Dominguez, J.; Gonzales, E.; Tutuc, E.; Brener, I.; Shvets, G. Spectrally selective chiral silicon metasurfaces based on infrared Fano resonances. Nat. Commun. 2014, 5, 3892. [Google Scholar] [CrossRef] [PubMed]
- Ding, F.; Wang, Z.X.; He, S.L.; Shalaev, V.M.; Kildishev, A.V. Broadband High-Efficiency Half-Wave Plate: A Supercell-Based Plasmonic Metasurface Approach. ACS Nano 2015, 9, 4111–4119. [Google Scholar] [CrossRef] [PubMed]
- Khorasaninejad, M.; Aieta, F.; Kanhaiya, P.; Kats, M.A.; Genevet, P.; Rousso, D.; Capasso, F. Achromatic Metasurface Lens at Telecommunication Wavelengths. Nano Lett. 2015, 15, 5358–5362. [Google Scholar] [CrossRef] [PubMed]
- Kim, J.; Li, Y.M.; Miskiewicz, M.N.; Oh, C.; Kudenov, M.W.; Escuti, M.J. Fabrication of ideal geometric-phase holograms with arbitrary wavefronts. Optica 2015, 2, 958–964. [Google Scholar] [CrossRef]
- Xia, Y.N.; Whitesides, G.M. Soft lithography. Annu. Rev. Mater. Sci. 1998, 28, 153–184. [Google Scholar] [CrossRef]
- Unger, M.A.; Chou, H.P.; Thorsen, T.; Scherer, A.; Quake, S.R. Monolithic Microfabricated Valves and Pumps by Multilayer Soft Lithography. Science 2000, 288, 113–116. [Google Scholar] [CrossRef] [Green Version]
- McDonald, J.C.; Duffy, D.C.; Anderson, J.R.; Chiu, D.T.; Wu, H.K.; Schueller, O.J.A.; Whitesides, G.M. Fabrication of microfluidic systems in poly(dimethylsiloxane). Electrophoresis 2000, 21, 27–40. [Google Scholar] [CrossRef]
- Avayu, O.; Almeida, E.; Prior, Y.; Ellenbogen, T. Composite functional metasurfaces for multispectral achromatic optics. Nat. Commun. 2017, 8, 14992. [Google Scholar] [CrossRef] [PubMed]
- Arbabi, E.; Arbabi, A.; Kamali, S.M.; Horie, Y.; Faraon, A. Multiwavelength metasurfaces through spatial multiplexing. Sci. Rep. 2016, 6, 32803. [Google Scholar] [CrossRef] [PubMed]
- Lin, D.; Holsteen, A.L.; Maguid, E.; Wetzstein, G.; Kik, P.G.; Hasman, E. Photonic multitasking interleaved SI nanoantenna phased array. Nano Lett. 2016, 12, 7671–7676. [Google Scholar] [CrossRef] [PubMed]
- Wang, S.; Wu, P.C.; Su, V.C.; Lai, Y.C.; Chen, M.K.; Kuo, H.Y. A broadband achromatic metalens in the visible. Nat. Nanotechnol. 2018, 13, 227–232. [Google Scholar] [CrossRef] [PubMed]
- Miks, A.; Novak, J. Analysis of two-element zoom systems based on variable power lenses. Opt. Express 2010, 18, 6797–6810. [Google Scholar] [CrossRef] [PubMed]
- Dong, L.; Agarwal, A.K.; Beebe, D.J.; Jiang, H.R. Adaptive liquid microlenses activated by stimuli-responsive hydrogels. Nature 2006, 442, 551–554. [Google Scholar] [CrossRef] [PubMed]
- Mishra, K.; Murade, C.; Carreel, B.; Roghair, I.; Oh, J.M.; Manukyan, G.; Van den Ende, D.; Mugele, F. Optofluidic lens with tunable focal length and asphericity. Sci. Rep. UK 2014, 4, 6378. [Google Scholar] [CrossRef] [PubMed] [Green Version]
- Lin, H.C.; Lin, Y.H. An electrically tunable focusing liquid crystal lens with a built-in planar polymeric lens. Appl. Phys. Lett. 2011, 98, 083503. [Google Scholar] [CrossRef] [Green Version]
- Hasan, N.; Banerjee, A.; Kim, H.; Mastrangelo, C.H. Tunable-focus lens for adaptive eyeglasses. Opt. Express 2017, 25, 1221–1233. [Google Scholar] [CrossRef] [PubMed]
- He, Z.; Lee, Y.H.; Chanda, D.; Wu, S.T. Adaptive liquid crystal microlens array enabled by two-photon polymerization. Opt. Express 2018, 26, 21184–21193. [Google Scholar] [CrossRef] [PubMed]
- Zeng, X.; Li, C.; Zhu, D.; Zhu, D.F.; Cho, H.J.; Jiang, H.R. Tunable microlens arrays actuated by various thermo-responsive hydrogel structures. J. Micromech. Microeng. 2010, 20, 115035. [Google Scholar] [CrossRef]
- Zhu, D.; Li, C.; Zeng, X.F.; Jiang, H.R. Tunable-focus microlens arrays on curved surfaces. Appl. Phys. Lett. 2010, 96, 081111. [Google Scholar] [CrossRef] [Green Version]
- Zeng, X.; Smith, C.T.; Gould, J.C.; Heise, C.P.; Jiang, H.R. Fiber Endoscopes Utilizing Liquid Tunable-Focus Microlenses Actuated Through Infrared Light. J. Microelectromech. Syst. 2011, 20, 583–593. [Google Scholar] [CrossRef]
- Zhang, W.; Aljasem, K.; Zappe, H. Completely integrated, thermo-pneumatically tunable microlens. Opt. Express 2011, 19, 2347–2362. [Google Scholar] [CrossRef] [PubMed]
- Kuiper, S.; Hendriks, B.H.W. Variable-focus liquid lens for miniature cameras. Appl. Phys. Lett. 2004, 85, 1128–1130. [Google Scholar] [CrossRef] [Green Version]
- Krupenkin, T.; Yang, S.; Mach, P. Tunable liquid microlens. Appl. Phys. Lett. 2003, 82, 316–318. [Google Scholar] [CrossRef]
- Li, C.; Jiang, H. Electrowetting-driven variable-focus microlens on flexible surfaces. Appl. Phys. Lett. 2012, 100, 231105. [Google Scholar] [CrossRef]
- Yang, C.C.; Tsai, C.G.; Yeh, J.A. Miniaturization of dielectric liquid microlens in package. Biomicrofluidics 2010, 4, 43006. [Google Scholar] [CrossRef] [Green Version]
- Ren, H.; Xu, S.; Liu, Y.; Wu, S.T. Electro-optical properties of dielectric liquid microlens. Opt. Commun. 2011, 284, 2122–2125. [Google Scholar] [CrossRef]
- Lin, H.C.; Lin, Y.H. An electrically tunable-focusing liquid crystal lens with a low voltage and simple electrodes. Opt. Express 2012, 20, 2045. [Google Scholar] [CrossRef]
- Cheng, C.C.; Chang, C.A.; Yeh, J.A. Variable focus dielectric liquid droplet lens. Opt. Express 2006, 14, 4101–4106. [Google Scholar] [CrossRef] [PubMed]
- Zhong, S.; Lu, Y.; Li, C.; Xu, H.X.; Shi, F.H.; Chen, Y.H. Tunable plasmon lensing in graphene-based structure exhibiting negative refraction. Sci. Rep. UK 2017, 7, 41788. [Google Scholar] [CrossRef] [PubMed] [Green Version]
- Chang, Y.C.; Jen, T.H.; Ting, C.H. High-resistance liquid-crystal lens array for rotaTable 2D/3D autostereoscopic display. Opt. Express 2014, 22, 2714. [Google Scholar] [CrossRef] [PubMed]
- Ye, M.; Wang, B.; Uchida, M.; Yanase, S.; Takahashi, S.; Yamaguchi, M.; Sato, S. Low-voltage-driving liquid crystal lens. Appl. Phys. 2010, 49, 352. [Google Scholar] [CrossRef]
- Ye, M.; Bin, W.; Sato, S. Liquid crystal lens with a focal length that is variable in a wide range. Appl. Opt. 2004, 43, 6407–6412. [Google Scholar] [CrossRef] [PubMed]
- Manual Zoom Lenses at Edmundoptics. Available online: https://www.edmundoptics.cn/f/manual-zoom-imaging-lenses/11363/ (accessed on 10 April 2019).
- Varifocal Imaging Lenses at Edmundoptics. Available online: https://www.edmundoptics.cn/f/varifocal-imaging-lenses/11853/ (accessed on 10 April 2019).
- Auto Iris Lenses at Edmundoptics. Available online: https://www.edmundoptics.cn/f/auto-iris-lenses/12808/ (accessed on 10 April 2019).
- Close Focus Zoom Lenses at Edmundoptics. Available online: https://www.edmundoptics.cn/f/close-focus-zoom-lenses/11392/ (accessed on 10 April 2019).
- Dynamic Focus Lens at Edmundoptics. Available online: https://www.edmundoptics.cn/f/dynamic-focus-vzm-lens/14965/ (accessed on 10 April 2019).
Applications | Modulation Mechanism | Operation Band | Speed | References | |
---|---|---|---|---|---|
Frequency, amplitude and polarization state | Filter | Electrostatic actuation | THz | KHz | [44,45] |
Thermo-actuation | THz | KHz | [61] | ||
Polarizer | Electrostatic actuation | THz | KHz | [63,64,65] | |
Microfluidic pressure actuation | GHz | Hz | [67,68] | ||
Switch | Electrostatic actuation | NIR | KHz to MHz | [5,25] | |
Thermo-optical effect | IR | KHz | [49] | ||
Absorption and emission | Absorber | Electrostatic actuation | THz | KHz | [7] |
Thermo-actuation | THz | KHz | [42,59] | ||
Microfluidic pressure actuation | GHz to THz | Hz | [69,70] | ||
Emitter | Electrostatic actuation | IR | KHz to MHz | [37] | |
Thermo-actuation | IR | KHz | [38] | ||
Wavefront manipulation | Beam Steering | Electrostatic actuation | GHz | Not reported | [71,72,85] |
Thermo-optical effect | MIR | KHz | [86] | ||
Microfluidic pressure actuation | GHz | Hz | [74,87] | ||
Lens | Electrostatic actuation | GHz | Not reported | [79] | |
Microfluidic pressure actuation | GHz | Hz | [52,80] |
© 2019 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
Share and Cite
He, S.; Yang, H.; Jiang, Y.; Deng, W.; Zhu, W. Recent Advances in MEMS Metasurfaces and Their Applications on Tunable Lens. Micromachines 2019, 10, 505. https://doi.org/10.3390/mi10080505
He S, Yang H, Jiang Y, Deng W, Zhu W. Recent Advances in MEMS Metasurfaces and Their Applications on Tunable Lens. Micromachines. 2019; 10(8):505. https://doi.org/10.3390/mi10080505
Chicago/Turabian StyleHe, Shaowei, Huimin Yang, Yunhui Jiang, Wenjun Deng, and Weiming Zhu. 2019. "Recent Advances in MEMS Metasurfaces and Their Applications on Tunable Lens" Micromachines 10, no. 8: 505. https://doi.org/10.3390/mi10080505