Order Reprints
Journal: Micromachines, 2010
Volume: 1
Page(s): 68-81
Article:
Reducing Pull-In Voltage by Adjusting Gap Shape in Electrostatically Actuated Cantilever and Fixed-Fixed Beams
Haluzan, D.T.; Klymyshyn, D.M.; Achenbach, S.; Börner, M.
http://www.mdpi.com/2072-666X/1/2/68
