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Journal: MicromachinesVolume: 1Number: 68
Article: Reducing Pull-In Voltage by Adjusting Gap Shape in Electrostatically Actuated Cantilever and Fixed-Fixed Beams
- Authors:
- Darcy T. Haluzan 1,2,*,
- David M. Klymyshyn 1,2 and
- Martin Börner 3
- et al.
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