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Journal: Materials, 2013
Volume: 6
Page(s): 244-254
244-254
Article: Modeling the Microstructure Curvature of Boron-Doped Silicon in Bulk Micromachined Accelerometer
Zhou, W.; Yu, H.; Peng, B.; Shen, H.; He, X.; Su, W.

http://www.mdpi.com/1996-1944/6/1/244

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