Fiber-Optic Thermal Sensor for TiN Film Crack Monitoring
AbstractThe study focuses on the thermal and temperature sensitivity behavior of an optical fiber sensor device. In this article, a titanium nitride (TiN)-coated fiber Bragg grating (FBG) sensor fabricated using an ion beam sputtering system was investigated. The reflection spectra of the FBG sensor were tested using R-soft optical software to simulate the refractive index sensitivity. In these experiments, the temperature sensitivity of the TiN FBG was measured at temperatures ranging from 100 to 500 °C using an optical spectrum analyzer (OSA). The results showed that the temperature sensitivity of the proposed TiN FBG sensor reached 12.8 pm/°C for the temperature range of 100 to 300 °C and 20.8 pm/°C for the temperature range of 300 to 500 °C. Additionally, we found that the produced oxidation at temperatures of 400-500 °C caused a crack, with the crack becoming more and more obvious at higher and higher temperatures. View Full-Text
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Hsu, H.-C.; Hsieh, T.-S.; Chen, Y.-C.; Chen, H.-E.; Tsai, L.; Chiang, C.-C. Fiber-Optic Thermal Sensor for TiN Film Crack Monitoring. Materials 2017, 10, 1297.
Hsu H-C, Hsieh T-S, Chen Y-C, Chen H-E, Tsai L, Chiang C-C. Fiber-Optic Thermal Sensor for TiN Film Crack Monitoring. Materials. 2017; 10(11):1297.Chicago/Turabian Style
Hsu, Hsiang-Chang; Hsieh, Tso-Sheng; Chen, Yi-Chian; Chen, Hung-En; Tsai, Liren; Chiang, Chia-Chin. 2017. "Fiber-Optic Thermal Sensor for TiN Film Crack Monitoring." Materials 10, no. 11: 1297.
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