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Sensors 2009, 9(5), 3666-3678; doi:10.3390/s90503666

Optimal Design and Operation for a No-Moving-Parts-Valve (NMPV) Micro-Pump with a Diffuser Width of 500 µm

1,* , 2
1 Department of Mechanical and Electro-Mechanical Engineering, National I Lan University / 1, Sec. 1, Shen-Lung Road, I-Lan, 26047, Taiwan 2 Department of Aeronautics and Astronautics, National Cheng Kung University / 1, Ta-Hsueh Road, Tainan 70101, Taiwan
* Author to whom correspondence should be addressed.
Received: 28 March 2009 / Revised: 28 April 2009 / Accepted: 15 May 2009 / Published: 15 May 2009
(This article belongs to the Section Chemical Sensors)
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A no-moving-parts-valve (NMPV) with a diffuser width of D = 500 microns was investigated in this study by numerical simulations at Reynolds numbers, ReD, ranging from 20 to 75, and expansion valve angles ranging from 30° < θ1 < 57° and 110° < θ2 < 120°. The D p,i value, 1.02 < D p,i < 1.14, is larger within the proposed range of the expansion valve angles. A flow channel structure with a depth of 500 micron is manufactured using yellow light lithography in this study. From prior analyses and experiments, it is found that piezoelectric films work better at a buzz driving frequency of f < 30Hz and the best operating frequency is at a driving frequency of f = 10Hz because it produces the largest net flow. In addition, the expansion angles θ1 = 30° and θ2 = 120° are the best expansion angles because they produce the largest net flow. These related results are very helpful for the actual design of no-moving-parts-valve micro-pump.
Keywords: no-moving-parts-valve (NMPV); expansion valve angle; net flow no-moving-parts-valve (NMPV); expansion valve angle; net flow
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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Wang, C.-T.; Leu, T.-S.; Sun, J.-M. Optimal Design and Operation for a No-Moving-Parts-Valve (NMPV) Micro-Pump with a Diffuser Width of 500 µm. Sensors 2009, 9, 3666-3678.

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