Sensors 2009, 9(5), 3469-3490; doi:10.3390/s90503469
Review

Feasibility Studies on Si-Based Biosensors

1,* email, 2, 3email, 4email, 2email, 3email and 1email
Received: 20 February 2009; in revised form: 6 April 2009 / Accepted: 9 April 2009 / Published: 11 May 2009
(This article belongs to the Special Issue State-of-the-Art Sensors Technology in Italy)
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Abstract: The aim of this paperis to summarize the efforts carried out so far in the fabrication of Si-based biosensors by a team of researchers in Catania, Italy. This work was born as a collaboration between the Catania section of the Microelectronic and Microsystem Institute (IMM) of the CNR, the Surfaces and Interfaces laboratory (SUPERLAB) of the Consorzio Catania Ricerche and two departments at the University of Catania: the Biomedical Science and the Biological Chemistry and Molecular Biology Departments. The first goal of our study was the definition and optimization of an immobilization protocol capable of bonding the biological sensing element on a Si-based surface via covalent chemical bonds. We chose SiO2 as the anchoring surface due to its biocompatibility and extensive presence in microelectronic devices. The immobilization protocol was tested and optimized, introducing a new step, oxide activation, using techniques compatible with microelectronic processing. The importance of the added step is described by the experimental results. We also tested different biological molecule concentrations in the immobilization solutions and the effects on the immobilized layer. Finally a MOS-like structure was designed and fabricated to test an electrical transduction mechanism. The results obtained so far and the possible evolution of the research field are described in this review paper.
Keywords: Si-based biosensors; biological molecules immobilization; glutaraldehyde; glucose oxidase; DNA strands; metallothioneines; microelectronic compatibility
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MDPI and ACS Style

Libertino, S.; Aiello, V.; Scandurra, A.; Renis, M.; Sinatra, F.; Lombardo, S. Feasibility Studies on Si-Based Biosensors. Sensors 2009, 9, 3469-3490.

AMA Style

Libertino S, Aiello V, Scandurra A, Renis M, Sinatra F, Lombardo S. Feasibility Studies on Si-Based Biosensors. Sensors. 2009; 9(5):3469-3490.

Chicago/Turabian Style

Libertino, Sebania; Aiello, Venera; Scandurra, Antonino; Renis, Marcella; Sinatra, Fulvia; Lombardo, Salvatore. 2009. "Feasibility Studies on Si-Based Biosensors." Sensors 9, no. 5: 3469-3490.

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