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Sensors 2009, 9(4), 2706-2718; doi:10.3390/s90402706
Article

Comparison between Deflection and Vibration Characteristics of Rectangular and Trapezoidal profile Microcantilevers

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Received: 2 April 2009; in revised form: 10 April 2009 / Accepted: 15 April 2009 / Published: 16 April 2009
(This article belongs to the Section Biosensors)
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Abstract: Arrays of microcantilevers are increasingly being used as physical, biological, and chemical sensors in various applications. To improve the sensitivity of microcantilever sensors, this study analyses and compares the deflection and vibration characteristics of rectangular and trapezoidal profile microcantilevers. Three models of each profile are investigated. The cantilevers are analyzed for maximum deflection, fundamental resonant frequency and maximum stress. The surface stress is modelled as in-plane tensile force applied on the top edge of the microcantilevers. A commercial finite element analysis software ANSYS is used to analyze the designs. Results show paddled trapezoidal profile microcantilevers have better sensitivity.
Keywords: Sensor; Surface stress; Microcantilever; Resonant Frequency; Deflection Sensor; Surface stress; Microcantilever; Resonant Frequency; Deflection
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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MDPI and ACS Style

Ansari, M.Z.; Cho, C.; Kim, J.; Bang, B. Comparison between Deflection and Vibration Characteristics of Rectangular and Trapezoidal profile Microcantilevers. Sensors 2009, 9, 2706-2718.

AMA Style

Ansari MZ, Cho C, Kim J, Bang B. Comparison between Deflection and Vibration Characteristics of Rectangular and Trapezoidal profile Microcantilevers. Sensors. 2009; 9(4):2706-2718.

Chicago/Turabian Style

Ansari, Mohd. Zahid; Cho, Chongdu; Kim, Jooyong; Bang, Booun. 2009. "Comparison between Deflection and Vibration Characteristics of Rectangular and Trapezoidal profile Microcantilevers." Sensors 9, no. 4: 2706-2718.



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