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Sensors 2009, 9(4), 2498-2510; doi:10.3390/s90402498
Article

A Small-Displacement Sensor Using Total Internal Reflection Theory and Surface Plasmon Resonance Technology for Heterodyne Interferometry

Received: 20 March 2009; in revised form: 9 April 2009 / Accepted: 10 April 2009 / Published: 14 April 2009
(This article belongs to the Section Physical Sensors)
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Abstract: A small-displacement sensor based on total-internal reflection theory and surface plasmon resonance technology is proposed for use in heterodyne interferometry. A small displacement can be obtained simply by measuring the variation in phase difference between s- and p-polarization states with the small-displacement sensor. The theoretical displacement resolution of the small-displacement sensor can reach 0.45 nm. The sensor has some additional advantages, e.g., a simple optical setup, high resolution, high sensitivity and rapid measurement. Its feasibility is also demonstrated.
Keywords: Total internal reflection (TIR); surface plasmon resonance (SPR); heterodyne interferometry (HI); small-displacement sensor Total internal reflection (TIR); surface plasmon resonance (SPR); heterodyne interferometry (HI); small-displacement sensor
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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MDPI and ACS Style

Wang, S.-F. A Small-Displacement Sensor Using Total Internal Reflection Theory and Surface Plasmon Resonance Technology for Heterodyne Interferometry. Sensors 2009, 9, 2498-2510.

AMA Style

Wang S-F. A Small-Displacement Sensor Using Total Internal Reflection Theory and Surface Plasmon Resonance Technology for Heterodyne Interferometry. Sensors. 2009; 9(4):2498-2510.

Chicago/Turabian Style

Wang, Shinn-Fwu. 2009. "A Small-Displacement Sensor Using Total Internal Reflection Theory and Surface Plasmon Resonance Technology for Heterodyne Interferometry." Sensors 9, no. 4: 2498-2510.


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