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Sensors 2009, 9(4), 2498-2510; doi:10.3390/s90402498
Article

A Small-Displacement Sensor Using Total Internal Reflection Theory and Surface Plasmon Resonance Technology for Heterodyne Interferometry

Department of Electronic Engineering, Ching Yun University, No.229, Chien-Hsin Rd., Jhongli City, Taoyuan, 320, Taiwan, ROC
Received: 20 March 2009 / Revised: 9 April 2009 / Accepted: 10 April 2009 / Published: 14 April 2009
(This article belongs to the Section Chemical Sensors)
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Abstract

A small-displacement sensor based on total-internal reflection theory and surface plasmon resonance technology is proposed for use in heterodyne interferometry. A small displacement can be obtained simply by measuring the variation in phase difference between s- and p-polarization states with the small-displacement sensor. The theoretical displacement resolution of the small-displacement sensor can reach 0.45 nm. The sensor has some additional advantages, e.g., a simple optical setup, high resolution, high sensitivity and rapid measurement. Its feasibility is also demonstrated.
Keywords: Total internal reflection (TIR); surface plasmon resonance (SPR); heterodyne interferometry (HI); small-displacement sensor Total internal reflection (TIR); surface plasmon resonance (SPR); heterodyne interferometry (HI); small-displacement sensor
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).
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Wang, S.-F. A Small-Displacement Sensor Using Total Internal Reflection Theory and Surface Plasmon Resonance Technology for Heterodyne Interferometry. Sensors 2009, 9, 2498-2510.

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