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Sensors 2009, 9(12), 10201-10216; doi:10.3390/s91210201
Article

Numerical Analysis of Dynamic Effects of a Nonlinear Vibro-Impact Process for Enhancing the Reliability of Contact-Type MEMS Devices

1
, 2
 and 2,*
Received: 9 November 2009; in revised form: 7 December 2009 / Accepted: 10 December 2009 / Published: 16 December 2009
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Abstract: This paper reports on numerical modeling and simulation of a generalized contact-type MEMS device having large potential in various micro-sensor/actuator applications, which are currently limited because of detrimental effects of the contact bounce phenomenon that is still not fully explained and requires comprehensive treatment. The proposed 2-D finite element model encompasses cantilever microstructures operating in a vacuum and impacting on a viscoelastic support. The presented numerical analysis focuses on the first three flexural vibration modes and their influence on dynamic characteristics. Simulation results demonstrate the possibility to use higher modes and their particular points for enhancing MEMS performance and reliability through reduction of vibro-impact process duration.
Keywords: MEMS; vibro-impact; contact; finite element analysis; nodal points; vibration modes MEMS; vibro-impact; contact; finite element analysis; nodal points; vibration modes
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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MDPI and ACS Style

Ostasevicius, V.; Gaidys, R.; Dauksevicius, R. Numerical Analysis of Dynamic Effects of a Nonlinear Vibro-Impact Process for Enhancing the Reliability of Contact-Type MEMS Devices. Sensors 2009, 9, 10201-10216.

AMA Style

Ostasevicius V, Gaidys R, Dauksevicius R. Numerical Analysis of Dynamic Effects of a Nonlinear Vibro-Impact Process for Enhancing the Reliability of Contact-Type MEMS Devices. Sensors. 2009; 9(12):10201-10216.

Chicago/Turabian Style

Ostasevicius, Vytautas; Gaidys, Rimvydas; Dauksevicius, Rolanas. 2009. "Numerical Analysis of Dynamic Effects of a Nonlinear Vibro-Impact Process for Enhancing the Reliability of Contact-Type MEMS Devices." Sensors 9, no. 12: 10201-10216.



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