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Sensors 2009, 9(12), 10201-10216; doi:10.3390/s91210201

Numerical Analysis of Dynamic Effects of a Nonlinear Vibro-Impact Process for Enhancing the Reliability of Contact-Type MEMS Devices

1
Institute for Hi-Tech Development, Kaunas University of Technology, Studentu 65, LT-51369 Kaunas, Lithuania
2
Faculty of Informatics, Kaunas University of Technology, Studentu 50, LT-51368 Kaunas, Lithuania
*
Author to whom correspondence should be addressed.
Received: 9 November 2009 / Revised: 7 December 2009 / Accepted: 10 December 2009 / Published: 16 December 2009
(This article belongs to the Special Issue Modeling, Testing and Reliability Issues in MEMS Engineering - 2009)
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Abstract

This paper reports on numerical modeling and simulation of a generalized contact-type MEMS device having large potential in various micro-sensor/actuator applications, which are currently limited because of detrimental effects of the contact bounce phenomenon that is still not fully explained and requires comprehensive treatment. The proposed 2-D finite element model encompasses cantilever microstructures operating in a vacuum and impacting on a viscoelastic support. The presented numerical analysis focuses on the first three flexural vibration modes and their influence on dynamic characteristics. Simulation results demonstrate the possibility to use higher modes and their particular points for enhancing MEMS performance and reliability through reduction of vibro-impact process duration.
Keywords: MEMS; vibro-impact; contact; finite element analysis; nodal points; vibration modes MEMS; vibro-impact; contact; finite element analysis; nodal points; vibration modes
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MDPI and ACS Style

Ostasevicius, V.; Gaidys, R.; Dauksevicius, R. Numerical Analysis of Dynamic Effects of a Nonlinear Vibro-Impact Process for Enhancing the Reliability of Contact-Type MEMS Devices. Sensors 2009, 9, 10201-10216.

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