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Sensors 2009, 9(10), 7785-7813; doi:10.3390/s91007785

Resonant Magnetic Field Sensors Based On MEMS Technology

1,2,* , 2
1 Centro de Investigación en Micro y Nanotecnología, Universidad Veracruzana / Calzada Ruiz Cortínes 455, 94292, Boca del Río, Veracruz, Mexico 2 Depto. Ingeniería Mecánica, Campus Irapuato-Salamanca, Universidad de Guanajuato / Carretera Salamanca-Valle de Santiago km 3.5+1.8 km, Salamanca, Guanajuato, Mexico 3 Instituto de Fisiología, Benemérita Universidad Autónoma de Puebla / 14 sur 6301, CU, San Manuel, 72750, Puebla, Puebla, Mexico
* Author to whom correspondence should be addressed.
Received: 27 July 2009 / Revised: 3 September 2009 / Accepted: 16 September 2009 / Published: 30 September 2009
(This article belongs to the Special Issue Sensor Configuration and Smart Sensors)


Microelectromechanical systems (MEMS) technology allows the integration of magnetic field sensors with electronic components, which presents important advantages such as small size, light weight, minimum power consumption, low cost, better sensitivity and high resolution. We present a discussion and review of resonant magnetic field sensors based on MEMS technology. In practice, these sensors exploit the Lorentz force in order to detect external magnetic fields through the displacement of resonant structures, which are measured with optical, capacitive, and piezoresistive sensing techniques. From these, the optical sensing presents immunity to electromagnetic interference (EMI) and reduces the read-out electronic complexity. Moreover, piezoresistive sensing requires an easy fabrication process as well as a standard packaging. A description of the operation mechanisms, advantages and drawbacks of each sensor is considered. MEMS magnetic field sensors are a potential alternative for numerous applications, including the automotive industry, military, medical, telecommunications, oceanographic, spatial, and environment science. In addition, future markets will need the development of several sensors on a single chip for measuring different parameters such as the magnetic field, pressure, temperature and acceleration.
Keywords: Lorentz force; magnetic field sensors; Microelectromechanical Systems (MEMS); resonant structures Lorentz force; magnetic field sensors; Microelectromechanical Systems (MEMS); resonant structures
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Herrera-May, A.L.; Aguilera-Cortés, L.A.; García-Ramírez, P.J.; Manjarrez, E. Resonant Magnetic Field Sensors Based On MEMS Technology. Sensors 2009, 9, 7785-7813.

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