Sensors 2008, 8(9), 5466-5478; doi:10.3390/s8095466
Article

Mid-Infrared Tunable Resonant Cavity Enhanced Detectors

Received: 17 July 2008; in revised form: 1 September 2008 / Accepted: 1 September 2008 / Published: 4 September 2008
(This article belongs to the Special Issue State-of-the-Art Sensors Technology in Switzerland)
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Abstract: Mid-infrared detectors that are sensitive only in a tunable narrow spectral band are presented. They are based on the Resonant Cavity Enhanced Detector (RCED) principle and employing a thin active region using IV-VI narrow gap semiconductor layers. A Fabry-Pérot cavity is formed by two mirrors. The active layer is grown onto one mirror, while the second mirror can be displaced. This changes the cavity length thus shifting the resonances where the detector is sensitive. Using electrostatically actuated MEMS micromirrors, a very compact tunable detector system has been fabricated. Mirror movements of more than 3 μm at 30V are obtained. With these mirrors, detectors with a wavelength tuning range of about 0.7 μm have been realized. Single detectors can be used in mid-infrared micro spectrometers, while a detector arrangement in an array makes it possible to realize Adaptive Focal Plane Arrays (AFPA).
Keywords: RCED; MEMS; micromirror; Fabry-Perot; mid infrared; micro spectrometer
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MDPI and ACS Style

Quack, N.; Blunier, S.; Dual, J.; Felder, F.; Arnold, M.; Zogg, H. Mid-Infrared Tunable Resonant Cavity Enhanced Detectors. Sensors 2008, 8, 5466-5478.

AMA Style

Quack N, Blunier S, Dual J, Felder F, Arnold M, Zogg H. Mid-Infrared Tunable Resonant Cavity Enhanced Detectors. Sensors. 2008; 8(9):5466-5478.

Chicago/Turabian Style

Quack, Niels; Blunier, Stefan; Dual, Jurg; Felder, Ferdinand; Arnold, Martin; Zogg, Hans. 2008. "Mid-Infrared Tunable Resonant Cavity Enhanced Detectors." Sensors 8, no. 9: 5466-5478.

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