CMOS Humidity Sensor System Using Carbon Nitride Film as Sensing Materials

doi:10.3390/s8042662

This article is

freely available
re-usable

Sensors 2008, 8(4), 2662-2672; doi:10.3390/s8042662

Article

CMOS Humidity Sensor System Using Carbon Nitride Film as Sensing Materials

Sung Pil Lee^1,* , Ji Gong Lee² and Shaestagir Chowdhury³

¹ Department of Electronic Engineering, Kyungnam University, Masan, Kyungnam 631-701, Korea ² Electrical Engineering and Computer Science, Case Western Reserve University, Cleveland, Ohio 44106, USA ³ Intel Corporation, Hillsboro, OR 97124, USA

* Author to whom correspondence should be addressed.

Received: 12 February 2008 / Accepted: 10 April 2008 / Published: 14 April 2008

Download PDF Full-Text [2115 KB, uploaded 16 September 2008 11:02 CEST]

Abstract: An integrated humidity sensor system with nano-structured carbon nitride film as humidity sensing material is fabricated by a 0.8 μm analog mixed CMOS process. The integrated sensor system consists of differential humidity sensitive field effect transistors (HUSFET), temperature sensor, and operational amplifier. The process contains two poly, two metal and twin well technology. To form CN_xfilm on Si₃N₄/Si substrate, plasma etching is performed to the gate area as well as trenches. CN_x film is deposited by reactive RF magnetron sputtering method and patterned by the lift-off technique. The drain current is proportional to the dielectric constant, and the sensitivity is 2.8 ㎂/%RH.

Keywords: Integrated sensors; Humidity; CMOS; Carbon nitride film

Article Statistics

Click here to load and display the download statistics.

Cite This Article

MDPI and ACS Style

Lee, S.P.; Lee, J.G.; Chowdhury, S. CMOS Humidity Sensor System Using Carbon Nitride Film as Sensing Materials. Sensors 2008, 8, 2662-2672.

AMA Style

Lee S.P., Lee J.G., Chowdhury S. CMOS Humidity Sensor System Using Carbon Nitride Film as Sensing Materials. Sensors. 2008; 8(4):2662-2672.

Chicago/Turabian Style

Lee, Sung P.; Lee, Ji G.; Chowdhury, Shaestagir. 2008. "CMOS Humidity Sensor System Using Carbon Nitride Film as Sensing Materials." Sensors 8, no. 4: 2662-2672.

Sensors EISSN 1424-8220 Published by MDPI Publishing, Basel, Switzerland RSS E-Mail Table of Contents Alert