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Sensors 2007, 7(4), 493-507; doi:10.3390/s7040493

Fabrication and Characterization of PZT Thick Films for Sensing and Actuation

1,*  and 2
1 Department of Electrical Engineering and Center for Micro/Nano Science and Technology, National Cheng Kung University, Tainan 710, Taiwan 2 Institute of Nanotechnology and Microsystem Engineering, National Cheng Kung University, Tainan 710, Taiwan
* Author to whom correspondence should be addressed.
Received: 16 February 2007 / Accepted: 4 April 2007 / Published: 18 April 2007
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Lead Zirconate Titanate oxide (PZT) thick films with thicknesses of up to 10 μmwere developed using a modified sol-gel technique. Usually, the film thickness is less than1 μm by conventional sol-gel processing, while the electrical charge accumulation whichreveals the direct effect of piezoelectricity is proportional to the film thickness and thereforerestricted. Two approaches were adopted to conventional sol-gel processing – precursorconcentration modulation and rapid thermal annealing. A 10 μm thick film was successfullyfabricated by coating 16 times via this technique. The thickness of each coating layer wasabout 0.6 μm and the morphology of the film was dense with a crack-free area as large as 16mm2. In addition, the structure, surface morphology and physical properties werecharacterized by X-ray diffraction (XRD), scanning electron microscopy (SEM) and atomicforce microscopy (AFM) and electrical performance. The dielectric constant and hysteresisloops were measured as electric characteristics. This study investigates the actuation andsensing performance of the vibrating structures with the piezoelectric thick film. Theactuation tests demonstrated that a 4 mm x 4 mm x 6.5 μm PZT film drove a 40 mm x 7 mmx 0.5 mm silicon beam as an actuator. Additionally, it generated an electrical signal of 60mVpp as a sensor, while vibration was input by a shaker. The frequencies of the first twomodes of the beam were compared with the theoretical values obtained by Euler-Bernoullibeam theory. The linearity of the actuation and sensing tests were also examined.
Keywords: PZT thick films; Sol-gel; Actuator; Sensor PZT thick films; Sol-gel; Actuator; Sensor
This is an open access article distributed under the Creative Commons Attribution License (CC BY) which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Jang, L.-S.; Kuo, K.-C. Fabrication and Characterization of PZT Thick Films for Sensing and Actuation. Sensors 2007, 7, 493-507.

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