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• Chou, SMin
• Teoh, LGaik
• Lai, WHao
• Su, YHsun
• Hon, MHsiung
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• Teoh, LGaik
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• Su, YHsun
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Sensors 2006, 6(10), 1420-1427; doi:10.3390/s6101420

Article

ZnO:Al Thin Film Gas Sensor for Detection of Ethanol Vapor

Shih Min Chou ¹ , Lay Gaik Teoh ^2,* , Wei Hao Lai ¹ , Yen Hsun Su ¹  and Min Hsiung Hon ¹

¹ Department of Materials Science and Engineering, National Cheng Kung University, No. 1, Ta-Hsueh Road, Tainan 70101, Taiwan ² Department of Mechanical Engineering, National Pingtung University of Science and Technology, No. 1, Shuehfu Road, Neipu, Pingtung 91201, Taiwan

* Author to whom correspondence should be addressed.

Received: 31 July 2006 / Accepted: 27 October 2006 / Published: 30 October 2006

(This article belongs to the Special Issue Gas Sensors)

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Abstract: The ZnO:Al thin films were prepared by RF magnetron sputtering on Si substrateusing Pt as interdigitated electrodes. The structure was characterized by XRD and SEManalyses, and the ethanol vapor gas sensing as well as electrical properties have beeninvestigated and discussed. The gas sensing results show that the sensitivity for detecting400 ppm ethanol vapor was ~20 at an operating temperature of 250°C. The high sensitivity,fast recovery, and reliability suggest that ZnO:Al thin film prepared by RF magnetronsputtering can be used for ethanol vapor gas sensing.

Keywords: ZnO:Al; sputtering; ethanol gas sensor; thin films.

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