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ZnO:Al Thin Film Gas Sensor for Detection of Ethanol Vapor
AbstractThe ZnO:Al thin films were prepared by RF magnetron sputtering on Si substrateusing Pt as interdigitated electrodes. The structure was characterized by XRD and SEManalyses, and the ethanol vapor gas sensing as well as electrical properties have beeninvestigated and discussed. The gas sensing results show that the sensitivity for detecting400 ppm ethanol vapor was ~20 at an operating temperature of 250°C. The high sensitivity,fast recovery, and reliability suggest that ZnO:Al thin film prepared by RF magnetronsputtering can be used for ethanol vapor gas sensing.
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Chou, S.M.; Teoh, L.G.; Lai, W.H.; Su, Y.H.; Hon, M.H. ZnO:Al Thin Film Gas Sensor for Detection of Ethanol Vapor. Sensors 2006, 6, 1420-1427.View more citation formats
Chou SM, Teoh LG, Lai WH, Su YH, Hon MH. ZnO:Al Thin Film Gas Sensor for Detection of Ethanol Vapor. Sensors. 2006; 6(10):1420-1427.Chicago/Turabian Style
Chou, Shih M.; Teoh, Lay G.; Lai, Wei H.; Su, Yen H.; Hon, Min H. 2006. "ZnO:Al Thin Film Gas Sensor for Detection of Ethanol Vapor." Sensors 6, no. 10: 1420-1427.