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ZnO:Al Thin Film Gas Sensor for Detection of Ethanol Vapor
Department of Materials Science and Engineering, National Cheng Kung University, No. 1, Ta-Hsueh Road, Tainan 70101, Taiwan
Department of Mechanical Engineering, National Pingtung University of Science and Technology, No. 1, Shuehfu Road, Neipu, Pingtung 91201, Taiwan
* Author to whom correspondence should be addressed.
Received: 31 July 2006; Accepted: 27 October 2006 / Published: 30 October 2006
(This article belongs to the Special Issue Gas Sensors
Abstract: The ZnO:Al thin films were prepared by RF magnetron sputtering on Si substrateusing Pt as interdigitated electrodes. The structure was characterized by XRD and SEManalyses, and the ethanol vapor gas sensing as well as electrical properties have beeninvestigated and discussed. The gas sensing results show that the sensitivity for detecting400 ppm ethanol vapor was ~20 at an operating temperature of 250°C. The high sensitivity,fast recovery, and reliability suggest that ZnO:Al thin film prepared by RF magnetronsputtering can be used for ethanol vapor gas sensing.
Keywords: ZnO:Al; sputtering; ethanol gas sensor; thin films.
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MDPI and ACS Style
Chou, S.M.; Teoh, L.G.; Lai, W.H.; Su, Y.H.; Hon, M.H. ZnO:Al Thin Film Gas Sensor for Detection of Ethanol Vapor. Sensors 2006, 6, 1420-1427.
Chou SM, Teoh LG, Lai WH, Su YH, Hon MH. ZnO:Al Thin Film Gas Sensor for Detection of Ethanol Vapor. Sensors. 2006; 6(10):1420-1427.
Chou, Shih M.; Teoh, Lay G.; Lai, Wei H.; Su, Yen H.; Hon, Min H. 2006. "ZnO:Al Thin Film Gas Sensor for Detection of Ethanol Vapor." Sensors 6, no. 10: 1420-1427.