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Sensors 2006, 6(10), 1420-1427; doi:10.3390/s6101420
Article

ZnO:Al Thin Film Gas Sensor for Detection of Ethanol Vapor

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Received: 31 July 2006; Accepted: 27 October 2006 / Published: 30 October 2006
(This article belongs to the Special Issue Gas Sensors)
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Abstract: The ZnO:Al thin films were prepared by RF magnetron sputtering on Si substrateusing Pt as interdigitated electrodes. The structure was characterized by XRD and SEManalyses, and the ethanol vapor gas sensing as well as electrical properties have beeninvestigated and discussed. The gas sensing results show that the sensitivity for detecting400 ppm ethanol vapor was ~20 at an operating temperature of 250°C. The high sensitivity,fast recovery, and reliability suggest that ZnO:Al thin film prepared by RF magnetronsputtering can be used for ethanol vapor gas sensing.
Keywords: ZnO:Al; sputtering; ethanol gas sensor; thin films. ZnO:Al; sputtering; ethanol gas sensor; thin films.
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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MDPI and ACS Style

Chou, S.M.; Teoh, L.G.; Lai, W.H.; Su, Y.H.; Hon, M.H. ZnO:Al Thin Film Gas Sensor for Detection of Ethanol Vapor. Sensors 2006, 6, 1420-1427.

AMA Style

Chou SM, Teoh LG, Lai WH, Su YH, Hon MH. ZnO:Al Thin Film Gas Sensor for Detection of Ethanol Vapor. Sensors. 2006; 6(10):1420-1427.

Chicago/Turabian Style

Chou, Shih M.; Teoh, Lay G.; Lai, Wei H.; Su, Yen H.; Hon, Min H. 2006. "ZnO:Al Thin Film Gas Sensor for Detection of Ethanol Vapor." Sensors 6, no. 10: 1420-1427.



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