Next Article in Journal
Electrochemical Study of Iodide in the Presence of Phenol and o-Cresol: Application to the Catalytic Determination of Phenol and o-Cresol
Previous Article in Journal
Inorganic Thin-film Sensor Membranes with PLD-prepared Chalcogenide Glasses: Challenges and Implementation
Sensors 2004, 4(10), 163-169; doi:10.3390/s41000163
Article

Fabrication of Thin-Film LAPS with Amorphous Silicon

1,* , 2,3, 4, 5 and 1
1 ISIR, Osaka University, 8-1 Mihogaoka, Ibaraki, Osaka 567-0047, Japan 2 University of Applied Sciences, Aachen (Division Jülich), Laboratory for Chemical Sensors and Biosensors, Ginsterweg 1, D-52428, Jülich, Germany 3 ISG-2, Research Centre Jülich, 52425 Jülich, Germany 4 IPV, Research Centre Jülich, 52425 Jülich, Germany 5 Humboldt University Berlin, Brook-Taylor-Str. 2, 12489 Berlin, Germany
* Author to whom correspondence should be addressed.
Received: 9 August 2004 / Accepted: 27 August 2004 / Published: 30 October 2004
View Full-Text   |   Download PDF [303 KB, uploaded 20 June 2014]   |   Browse Figures

Abstract

To improve the spatial resolution of the light-addressable potentiometric sensor (LAPS), it is necessary to reduce the thickness of the semiconductor layer, which, however, causes a problem of the mechanical strength of the sensor plate. In this study, a thin-film LAPS was fabricated with amorphous silicon (a-Si) deposited on a transparent glass substrate. The current-voltage characteristics and pH sensitivity of the fabricated a-Si LAPS were investigated.
Keywords: LAPS; chemical imaging sensor; amorphous silicon; pH sensor LAPS; chemical imaging sensor; amorphous silicon; pH sensor
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).
SciFeed

Share & Cite This Article

Further Mendeley | CiteULike
Export to BibTeX |
EndNote |
RIS
MDPI and ACS Style

Yoshinobu, T.; Schöning, M.J.; Finger, F.; Moritz, W.; Iwasaki, H. Fabrication of Thin-Film LAPS with Amorphous Silicon. Sensors 2004, 4, 163-169.

View more citation formats

Related Articles

Article Metrics

For more information on the journal, click here

Comments

[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert